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Byung-am Lee

Samsung

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Publication

Featured researches published by Byung-am Lee.

Archive | 2001

Method of and device for detecting micro-scratches

Chung-sam Jun; Sang-mun Chon; Sang Bong Choi; Hyung-suk Cho; Pil-sik Hyun; Kyu-hong Lim; Byung-am Lee

Archive | 2005

Method and apparatus for classifying repetitive defects on a substrate

Young-Kyu Lim; Byung-am Lee; Byung-seol Ahn; Jae-Sun Cho; Chang-hoon Lee; Jung-Lan Lee; Sung-Man Lee

Archive | 2004

Method and apparatus for measuring dimensions of a pattern on a semiconductor device

Jin-woo Lee; Sang-Kil Lee; Byung-am Lee; Yong-Wan Kim; Hyo-Sang Cho; Byung-seol Ahn

Archive | 2004

Auto focusing apparatus and method

Young-wan Kim; Sang-Kil Lee; Byung-am Lee; Jin-woo Lee; Hyo-Sang Cho

Archive | 1997

In-line test of contact opening of semiconductor device

Sang-Kil Lee; Byung-am Lee; Kyoung-mo Yang

Archive | 2004

Method for aligning a wafer and apparatus for performing the same

Kyu-hong Lim; Byung-am Lee; Joo-Woo Kim; Chang-hoon Lee

Archive | 2005

Method and apparatus for aligning a substrate, method and apparatus for inspecting a defect on a substrate using the aligning method and apparatus

Sung-Man Lee; Byung-am Lee; Byung-seol Ahn; Jae-Sun Cho; Chang-hoon Lee; Young-Kyu Lim

Archive | 2004

Apparatus and method for inspecting patterns on wafers

Chang-hoon Lee; Byung-am Lee; Byung-seol Ahn; Jae-Sun Cho; Joo-Woo Kim; Sung-Man Lee

Archive | 2007

Wafer alignment apparatus

Kyu-hong Lim; Byung-am Lee; Joo-Woo Kim; Chang-hoon Lee

Archive | 2008

Autofocus method in a scanning electron microscope

Jong-Deok Kim; Byung-am Lee; Kyung-Ho Kim; Byung-seol Ahn; Young-hun Park; Kong-Jung Sa

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Collaboration

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Sang-Kil Lee

Samsung

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Byung-seol Ahn

Samsung

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Chang-hoon Lee

Samsung

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Hyo-Sang Cho

Samsung

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Kyu-hong Lim

Samsung

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Jin-woo Lee

Samsung

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Young-Kyu Lim

Samsung

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Chung-sam Jun

Samsung

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Hyung-suk Cho

Samsung

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Jae-Sun Cho

Samsung

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