Sangwon Kim

Fabrication and Characterization of Magnetic Microrobots for Three‐Dimensional Cell Culture and Targeted Transportation

Magnetically manipulated microrobots are demonstrated for targeted cell transportation. Full three-dimensional (3D) porous structures are fabricated with an SU-8 photoresist using a 3D laser lithography system. Nickel and titanium are deposited as a magnetic material and biocompatible material, respectively. The fabricated microrobots are controlled in the fluid by external magnetic fields. Human embryonic kidney 239 (HEK 239) cells are cultivated in the microrobot to show the possibility for targeted cell transportation.

Fabrication of a two-dimensional piezoelectric micromachined ultrasonic transducer array using a top-crossover-to-bottom structure and metal bridge connections

A new design methodology and fabrication process for two-dimensional (2D) piezoelectric micromachined ultrasonic transducer (pMUT) arrays using a top-crossover-to-bottom (TCTB) structure was developed. Individual sensing and actuation of pMUT elements from a small number of connection lines was enabled by the TCTB structure, and the parasitic coupling capacitance of the array was significantly reduced as a result. A 32 × 32 pMUT array with a TCTB structure was fabricated, resulting in 64 connection lines over an area of 4.8 × 4.8 mm2. The top electrodes for each pMUT element were re-connected by metal bridging after bottom-electrode etching caused them to become disconnected. A deep reactive ion etching process was used to compactify the array. Each pMUT element was a circular-shaped K31-type ultrasonic transducer using a 1 µm thick sol–gel lead zirconate titanate (PZT: Pb1.10 Zr0.52 Ti0.48) thin film. To characterize a single element in the 2D pMUT array, the resonant frequency and coupling coefficient of 20 pMUT elements were averaged to 3.85 MHz and 0.0112, respectively. The maximum measured ultrasound intensity in water, measured at a distance of 4 mm, was 4.6 µW cm−2 from a single pMUT element driven by a 5 Vpp sine wave at 2.22 MHz. Potential applications for development of a TCTB-arranged 2D pMUT array include ultrasonic medical imaging, ultrasonic communication, ultrasonic range-finding and handwriting input systems.

Mechanical frequency selectivity of an artificial basilar membrane using a beam array with narrow supports

The study presented in this paper assessed the frequency selectivity of an artificial basilar membrane (ABM) constructed using a piezoelectric beam array with narrow supports. Three ABM samples were constructed. Each ABM contained 16 beams with various lengths in a one-dimensional array. To experimentally assess the frequency selectivity of the ABM, mechanical vibration induced either by an electrical or an acoustic stimulus was measured with a scanning laser-Doppler vibrometer. The electro-mechanical and acousto-mechanical transfer functions were defined for the same purpose. The tonotopy of each beam array was visualized by post-processing the experimental results. Finite element analyses were conducted to numerically compute the resonance frequencies, identify the associated vibrational modes, and evaluate the harmonic responses of the beams. The influence of the residual stresses existing in the beams was reflected in the geometric models by introducing three different levels of arc-shaped lateral deformations in the beams. The harmonic analyses revealed that each beam of the ABM samples presented independent band-pass characteristics. The experiments and simulations commonly showed a frequency selectivity of the fabricated ABMs in the range of 2?20?kHz. Therefore, the device is suitable for development of a totally implantable artificial cochlea, implementing a mechanical frequency analyzer. This work is part of research to develop a prototype of a totally implantable artificial cochlea.

Fabrication and Manipulation of Ciliary Microrobots with Non-reciprocal Magnetic Actuation

Magnetically actuated ciliary microrobots were designed, fabricated, and manipulated to mimic cilia-based microorganisms such as paramecia. Full three-dimensional (3D) microrobot structures were fabricated using 3D laser lithography to form a polymer base structure. A nickel/titanium bilayer was sputtered onto the cilia part of the microrobot to ensure magnetic actuation and biocompatibility. The microrobots were manipulated by an electromagnetic coil system, which generated a stepping magnetic field to actuate the cilia with non-reciprocal motion. The cilia beating motion produced a net propulsive force, resulting in movement of the microrobot. The magnetic forces on individual cilia were calculated with various input parameters including magnetic field strength, cilium length, applied field angle, actual cilium angle, etc., and the translational velocity was measured experimentally. The position and orientation of the ciliary microrobots were precisely controlled, and targeted particle transportation was demonstrated experimentally.

Piezoelectric performance of continuous beam and narrow supported beam arrays for artificial basilar membranes

We report an experimental assessment of the electrical performance of two piezoelectric beam arrays for artificial basilar membranes (ABMs): a continuous beam array (CBA) and a narrow-supports beam array (NSBA). Both arrays consist of piezoelectric beams of sequentially varying lengths that mimic the frequency selectivity of mammalian cochleae. The narrow supports of the NSBA resulted in lateral deformation of the beams, whereas the CBA beams were flat. The displacement and piezoelectric output of each beam were measured at the resonance frequency of each beam using a scanning laser-Doppler vibrometer (SLDV). Both ABM prototypes showed mechanical frequency selectivity that depended on the beam length. The CBA generated a piezoelectric output in the range 6.6–23.2 μV and exhibited electrical frequency separability, whereas the NSBA failed to generate sufficient electrical potential due to the lateral deformation of the piezoelectric beams. The CBA was found to be more effective as an ABM, with potential for use in cochlear implants.

Characterization and modeling of an acoustic sensor using AlN thin-film for frequency selectivity

In this study, a one-dimensional beam array acoustic sensor was built using microelectromechanical system technology to achieve mechanical frequency selectivity. The acoustic sensor contained 16 beams of various lengths. The frequency selectivity was evaluated with a scanning laser Doppler vibrometer, while applying an alternating current having various frequencies with 2 volts amplitude and 0 volt offset. The beams formed separate band-pass filters in the proximity of the corresponding resonance frequencies in the range of 3 kHz to 13 kHz. The first resonance frequencies of the beams were calculated using finite element analysis to simulate the frequency response. In the finite element analysis models, mode shapes were studied to understand the effect of the beam deformation caused by the residual stress generated during the MEMS fabrication. The measured and simulated first resonance frequencies of the beams provided solid evidence of the tonotopicity of the sensor.

A study on improving the surface morphology of recycled wafer forsolar cells using micro_blaster

Recently, recycling method of waste wafer has been an area of solar cell to cut costs. Micro_blasting is one of the promising candidates for recycling of waste wafer due to their extremely simple and cost-effective process. In this paper, we attempt to explore the effect of micro_blasting and DRE(damage removal etching) process for solar cell. The optimal process conditions of micro_blasting are as follows: sized powder, jetting pressure of 400 kPa, and scan_speed of 30 cm/s. And the particles formed on micro_blasted wafer were removed by DRE precess which was performed by using HNA(HF//) and TMAH(tetramethyl ammonium hydroxide). Structural analysis was done using a-step and the XRD patterns.

Fabrication and Characterization of a Magnetic Drilling Actuator for Navigation in a Three-dimensional Phantom Vascular Network

Intravascular microrobots have emerged as a promising tool for vascular diseases. They can be wirelessly and precisely manipulated with a high degree of freedom. Previous studies have evaluated their drilling performance and locomotion, and showed the feasibility of using microrobots for biomedical applications in two-dimensional space. However, it is critical to validate micro-drillers in a three-dimensional (3D) environment because gravity plays an important role in a 3D environment and significantly affects the performance of the micro-drillers in vascular networks. In this work, we fabricated magnetic drilling actuators (MDAs) and characterized their locomotion and drilling performance in vascular network-mimicking fluidic channels. The MDAs were precisely manipulated in the fluidic channel network in both horizontal and vertical planes, selecting and moving through the desired path via the junctions of multiple channels. The MDAs also accurately navigated an artificial thrombosis in an artificial 3D vascular network and successfully drilled through it. The results obtained here confirmed the precise manipulation and drilling performance of the developed MDAs in 3D. We think that the MDAs presented in this paper have great potential as intravascular drillers for precise thrombus treatment.

Probe Array from BeCu Metal Sheet Using Heat and Fusing Currents

A probe array fabricated from a beryllium-copper metal sheet was developed in order to produce cost-effective microelectromechanical system (MEMS) probe cards. The probe array is fabricated via a simple, inexpensive process in which a heat current is used for annealing and a fusing current from a DC power supply is used for cutting the metal sheet. The stress relaxation time was 7 min during the application of a 4 A heat current, and the fusing current was 20 A. The contact force was approximately 1 gram force at a deflection of 100 μm, and the contact resistance from the tip of the probe to the end of the probe beam was 1.9 Ω. The probe array is suitable for use in probe cards, test sockets, and various types of manufacturing equipment.

Characterization of a mm-scale swimming microrobot for 3D manipulation

Microrobots have proven to be a promising approach for minimally invasive treatment in the biomedical field. The microdriller with wireless magnetic manipulation has great potential for vascular disease such as thrombosis. It is required to remotely navigate the microdriller in three-dimensional (3D) because the vascular network in a body is complicated and formed in 3D. In this study, the helical microdriller with different number of helix was fabricated using 3D printing and then a permanent magnet was inserted. Translational velocity of the microdriller was investigated, manipulating in the horizontal (XY) and vertical (XZ) axes for 3D manipulation. The developed microdriller was able to successfully overcome gravity, operate vertically and horizontally and horizontally. Translational velocity was inversely proportional to the number of helix. The results addressed that the microdriller can be manipulated in 3D, which shows the potential as a targeted thrombus treatment.