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Scott Battle

Entegris

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Publication

Featured researches published by Scott Battle.

Archive | 2007

Method and apparatus to help promote contact of gas with vaporized material

John Gregg; Scott Battle; Jeffrey I. Banton; Donn Naito; Ravi K. Laxman

Archive | 2003

Vaporizer delivery ampoule

John Gregg; Scott Battle; Jeffrey I. Banton; Donn Naito; Marianne Fuierer

Archive | 2007

Solid precursor-based delivery of fluid utilizing controlled solids morphology

John M. Cleary; Jose I. Arno; Bryan C. Hendrix; Donn Naito; Scott Battle; John Gregg; Michael J. Wodjenski; Chongying Xu

Archive | 2013

FLUORINE FREE TUNGSTEN ALD/CVD PROCESS

Weimin Li; David W. Peters; Scott Battle; William Hunks

Archive | 2013

Source reagent-based delivery of fluid with high material flux for batch deposition

Bryan C. Hendrix; John Gregg; Scott Battle; Donn Naito; John M. Cleary; Sebum Cheon; Jordan Hodges

Archive | 2015

Method and apparatus for helping promotion of contact between gas and vaporized material

グレッグ，ジョン; John Gregg; バトル，スコット; Scott Battle; バントン，ジェフリー，アイ．; Jeffrey I. Banton; ナイト，ドン; Donn Naito; ラックスマン，ラビ，ケイ．; Ravi K. Laxman

Archive | 2013

Alimentation en fluide basée sur un réactif source avec flux de matériau élevé pour dépôt discontinu

Bryan C. Hendrix; John Gregg; Scott Battle; Donn K. Ναito; John M. Cleary; Sebum Cheon

Semiconductor international | 2008

Solid-Source Delivery System Enables : Hafnium-Based Gâte Dielectrics

Mohith Verghese; Scott Battle; Jeff Roeder

Archive | 2007

Distribution de fluide fondée sur des précurseurs solides, faisant intervenir des solides à morphologie contrôlée

John M. Cleary; Jose I. Arno; Bryan C. Hendrix; Donn Naito; Scott Battle; John Gregg; Michael J. Wodjenski; Chongying Xu

Archive | 2007

Super-dry reagent compositions for formation of ultra low k films

Chongying Xu; Jeffrey F. Roeder; Thomas H. Baum; Steven M. Bilodeau; Scott Battle; William Hunks; Tianniu Chen

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Collaboration

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John Gregg

Entegris

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Donn Naito

Entegris

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John M. Cleary

Entegris

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Bryan C. Hendrix

Entegris

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Chongying Xu

University of New Mexico

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Jose I. Arno

Entegris

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Michael J. Wodjenski

Entegris

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Sebum Cheon

Entegris

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David W. Peters

Entegris

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Jeffrey F. Roeder

Bethel University

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