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Dive into the research topics where Sebastian Strobel is active.

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Featured researches published by Sebastian Strobel.


Optics Express | 2016

Role of heat accumulation in the multi-shot damage of silicon irradiated with femtosecond XUV pulses at a 1 Mhz repetition rate

R. Sobierajski; Iwanna Jacyna; Piotr Dłużewski; Marcin T. Klepka; D. Klinger; J.B. Pełka; T. Burian; V. Hajkova; L. Juha; Karel Saksl; Vojtěch Vozda; Igor Alexandrovich Makhotkin; Eric Louis; Bart Faatz; Kai Tiedtke; S. Toleikis; Hartmut Enkisch; Martin Hermann; Sebastian Strobel; R.A. Loch; J. Chalupsky

The role played by heat accumulation in multi-shot damage of silicon was studied. Bulk silicon samples were exposed to intense XUV monochromatic radiation of a 13.5 nm wavelength in a series of 400 femtosecond pulses, repeated with a 1 MHz rate (pulse trains) at the FLASH facility in Hamburg. The observed surface morphological and structural modifications are formed as a result of sample surface melting. Modifications are threshold dependent on the mean fluence of the incident pulse train, with all threshold values in the range of approximately 36-40 mJ/cm2. Experimental data is supported by a theoretical model described by the heat diffusion equation. The threshold for reaching the melting temperature (45 mJ/cm2) and liquid state (54 mJ/cm2), estimated from this model, is in accordance with experimental values within measurement error. The model indicates a significant role of heat accumulation in surface modification processes.


Optics Express | 2018

Mechanism of single-shot damage of Ru thin films irradiated by femtosecond extreme UV free-electron laser

Igor Milov; Igor Alexandrovich Makhotkin; R. Sobierajski; Nikita Medvedev; Vladimir Lipp; J. Chalupský; Jacobus Marinus Sturm; Kai Tiedtke; Gosse Charles De Vries; Michael Störmer; Frank Siewert; Robbert Wilhelmus Elisabeth van de Kruijs; Eric Louis; Iwanna Jacyna; M. Jurek; L. Juha; V. Hajkova; Vojtěch Vozda; T. Burian; Karel Saksl; Bart Faatz; Barbara Keitel; Elke Plönjes; Siegfried Schreiber; S. Toleikis; R.A. Loch; Martin Hermann; Sebastian Strobel; Han-Kwang Nienhuys; Grzegorz Gwalt

Ruthenium is a perspective material to be used for XUV mirrors at free-electron laser facilities. Yet, it is still poorly studied in the context of ultrafast laser-matter interaction. In this work, we present single-shot damage studies of thin Ru films irradiated by femtosecond XUV free-electron laser pulses at FLASH. Ex-situ analysis of the damaged spots, performed by different types of microscopy, shows that the weakest detected damage is surface roughening. For higher fluences we observe ablation of Ru. Combined simulations using Monte-Carlo code XCASCADE(3D) and the two-temperature model reveal that the damage mechanism is photomechanical spallation, similar to the case of irradiating the target with optical lasers. The analogy with the optical damage studies enables us to explain the observed damage morphologies.


Journal of Synchrotron Radiation | 2018

Experimental study of EUV mirror radiation damage resistance under long-term free-electron laser exposures below the single-shot damage threshold

Igor Alexandrovich Makhotkin; R. Sobierajski; J. Chalupský; Kai Tiedtke; Gosse Charles De Vries; Michael Störmer; Frank Scholze; Frank Siewert; Robbert Wilhelmus Elisabeth van de Kruijs; Igor Milov; Eric Louis; Iwanna Jacyna; M. Jurek; D. Klinger; Laurent Nittler; Y. Syryanyy; L. Juha; V. Hajkova; Vojtěch Vozda; T. Burian; Karel Saksl; Bart Faatz; Barbara Keitel; Elke Plönjes; Siegfried Schreiber; S. Toleikis; R.A. Loch; Martin Hermann; Sebastian Strobel; Han Kwang Nienhuys

An experimental study of the durability of extreme UV optical coatings to a large number of free-electron laser pulses is reported.


Archive | 2015

Reflective optical element, and optical system of a microlithographic projection exposure system

Hartmut Enkisch; Hans-Jochen Paul; Thomas Schicketanz; Oliver Dier; Joern Weber; Christian Grasse; Ralf Winter; Sebastian Strobel


Archive | 2014

EUV-Spiegel und optisches System mit EUV-Spiegel

Thomas Schicketanz; Oliver Dier; Sebastian Strobel; Ralf Winter


Archive | 2016

METHOD FOR PRODUCING A MIRROR ELEMENT

Hartmut Enkisch; Peter Huber; Sebastian Strobel


Journal of The Optical Society of America B-optical Physics | 2018

Damage accumulation in thin ruthenium films induced by repetitive exposure to femtosecond XUV pulses below the single-shot ablation threshold

Igor Alexandrovich Makhotkin; Igor Milov; J. Chalupský; Kai Tiedtke; Hartmut Enkisch; Gosse Charles De Vries; Frank Scholze; Frank Siewert; Jacobus Marinus Sturm; Konstantin Nikolaev; Robbert Wilhelmus Elisabeth van de Kruijs; M.A. Smithers; Henk A. G. M. van Wolferen; Enrico G. Keim; Eric Louis; Iwanna Jacyna; M. Jurek; D. Klinger; J.B. Pełka; L. Juha; V. Hajkova; Vojtěch Vozda; T. Burian; Karel Saksl; Bart Faatz; Barbara Keitel; Elke Plönjes; Siegfried Schreiber; Sven Toleikis; R.A. Loch


Physics of X-Ray and Neutron Multilayer Structures workshop 2016: PXRNMS Workshop 2016 | 2016

Single-shot damage of Ru thin film induced by FEL fs pulses

Igor Milov; Igor Alexandrovich Makhotkin; Hartmut Enkisch; R. Sobierajski; J. Chalupsky; Kai Tiedtke; Gosse Charles De Vries; Frank Scholze; Frank Siewert; Michael Störmer; Robbert Wilhelmus Elisabeth van de Kruijs; Enrico G. Keim; Hendricus A.G.M. van Wolferen; I. Yatsyna; M. Jurek; L. Juha; V. Hajkova; Vojtěch Vozda; T. Burian; Karel Saksl; Bart Faatz; Barbara Keitel; E. Ploenjes; Siegfried Schreiber; S. Toleikis; R.A. Loch; Martin Hermann; Sebastian Strobel; Han-Kwang Nienhuys; Eric Louis


Archive | 2016

Verfahren und Vorrichtung zur Oberflächenbearbeitung eines Elements für eine mikrolithographische Projektionsbelichtungsanlage

Sebastian Strobel


Archive | 2014

EUV-Spiegel und optisches System mit EUV-Spiegel EUV mirror and optical system with EUV mirror

Thomas Schicketanz; Oliver Dier; Sebastian Strobel; Ralf Winter

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Eric Louis

MESA+ Institute for Nanotechnology

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Igor Alexandrovich Makhotkin

MESA+ Institute for Nanotechnology

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L. Juha

Czechoslovak Academy of Sciences

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T. Burian

Academy of Sciences of the Czech Republic

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V. Hajkova

Academy of Sciences of the Czech Republic

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Vojtěch Vozda

Charles University in Prague

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Karel Saksl

Slovak Academy of Sciences

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Frank Siewert

Helmholtz-Zentrum Berlin

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