Seiichi Kiyama

HITTM cells—high‐efficiency crystalline Si cells with novel structure

Our unique, high-efficiency c-Si solar cell, named the HIT cell, has shown considerable potential to improve junction properties and surface passivation since it was first developed. The improved properties in efficiency and temperature dependence compared to conventional p – n diffused c-Si solar cells are featured in HIT power 21TM solar cell modules and other applications which are now on the market. In the area of research, further improvement in the junction properties of the a-Si/c-Si heterojunction has been examined, and the highest efficiency to date of 20.1% has recently been achieved for a cell size of 101 cm2. The high open circuit voltage exceeding 700 mV, due to the excellent surface passivation of the HIT structure, is responsible for this efficiency. In this paper, recent progress in HIT cells by Sanyo will be introduced. Copyright

Enlargement of Poly-Si Film Grain Size by Excimer Laser Annealing and Its Application to High-Performance Poly-Si Thin Film Transistor

By both numerical simulation and experimental investigation, we found it possible to enlarge the grain size (?3000 ?) of polycrystalline silicon (poly-Si) films by excimer laser annealing, using a new method to control the solidification process of molten Si - low-temperature (?400?C) substrate heating during laser annealing. Poly-Si thin-film transistors (TFTs) fabricated by this new excimer laser annealing method showed a high field-effect mobility of 230 cm2/V?s, and good uniformity of field-effect mobility (?10%) within the effective laser irradiation area.

Lateral Grain Growth of Poly-Si Films with a Specific Orientation by an Excimer Laser Annealing Method

Dramatic lateral grain growth of nondoped poly-Si films (maximum grain size: ~4.5 µm, film thickness: 500 A) with strong crystallographic (111) orientation on glass substrates has been achieved using an excimer laser annealing method, namely at low temperature below 400°C and in a processing time shorter than a second, for the first time. The surface morphology of these poly-Si films was very smooth and the crystallinity was excellent with minimal internal defects. These poly-Si films have monomodally distributed grain sizes, with an average grain size of around 1.5 µm. As a result of experimental study, we speculate that the basic driving force behind this lateral grain growth was surface free energy anisotropy, as the same mechanism was observed in high-temperature furnace annealing of doped poly-Si thin films.

Comprehensive study of lateral grain growth in poly-Si films by excimer laser annealing and its application to thin film transistors

Lateral grain growth in nondoped poly-Si films was studied by using Si thin films (500 A) with different structures as a starting material for excimer laser crystallization. It was clarified that the lateral grain growth phenomenon (micron-size grains with strong (111) orientation) upon excimer laser annealing was strongly affected by both the microstructure and the orientation of the initial Si thin films. This result supports our previous speculation that the principal driving force of the lateral grain growth phenomenon is surface energy anisotropy. Poly-Si thin-film transistors using these films show a high field effect mobility of 440 cm2/Vs, achieved through a low-temperature process below 600° C. This excellent electrical characteristic is thought to be due to the large grain size of poly-Si thin film with controlled orientation, good crystallinity, and a smooth surface.

High mobility poly-Si TFT by a new excimer laser annealing method for large area electronics

A high-mobility (280 cm/sup 2//V-s), high-throughput poly-Si TFT (thin-film transistor) formed using a low-temperature process (<or= 600 degrees C) has been achieved through a novel excimer laser annealing method. The method uses thin, active-layer poly-Si film (500 AA) and involves controlling the solidification process of molten Si by low-temperature (<or= 400 degrees C) substrate heating during laser annealing. Poly-Si film grain formed by this process is radically larger in size, and has minimal internal defects. The maximum grain size is over 5000 AA, and uniformity in field effect mobility was found to be +or-10% within the effective laser irradiation area.<<ETX>>

Laser Patterning Method for Integrated Type a-Si Solar Cell Submodules

A laser patterning method was investigated as a fabrication method for integrated-type amorphous-silicon (a-Si) solar cell submodules. A three-dimensional thermal analysis of a multilayer structure was performed to determine the selective scribing conditions for each layer of an a-Si solar cell. The optimum laser power densities calculated from a three-dimensional thermal analysis were confirmed by the experiments. It was found that not only transparent conductive oxide and a-Si films, but also the metal electrodes of the integrated-type a-Si solar cell submodule were selectively scribed. The total output power of an a-Si solar cell submodule patterned by optimum laser-power densities was 9% higher than that achieved by a conventional patterning method.

Improving the uniformity of poly-Si films using a new excimer laser annealing method for giant-microelectronics

Film uniformity is the main problem when applying laser-recrystallised poly-Si films to thin film transistors (TFTs) in giant micro electronics. However, this has been dramatically improved by a new excimer laser annealing method in which the solidification process of molten Si is controlled by low-temperature (400°C) substrate heating during excimer laser annealing. Poly-Si TFT fabricated around the laser irradiation overlap region exhibited a high field effect mobility uniformity of within ±8%.

Diagnostic technology and an expert system for photovoltaic systems using the learning method

Abstract Diagnostic technology for photovoltaic (PV) systems was developed, using the learning method to take each site’s conditions into account. This technology employs diagnostic criteria databases to analyze data acquired from the PV systems. These criteria are updated monthly for each site using analyzed data. To check the shadows on the PV modules and pyranometer, the sophisticated verification method was also applied to this technology. After the diagnosis, a basket method provides maintenance advice for the PV systems. Based on the results of precise diagnoses, this expert system offers quick and proper maintenance advice within a few minutes. This technology is highly useful, because it greatly simplifies the servicing and maintenance of PV systems.

An approach for the higher efficiency in the HIT cells

The highest conversion efficiency to date of 21.5% (confirmed by AIST) with a size of 100.3 cm/sup 2/ has been achieved in an HIT cell. Because of this high efficiency and the cells superior temperature characteristics, HIT cells are highly regarded by consumers. Sanyo will increase the production volume of cells and modules to meet the demand both inside and outside of Japan. We have been investigating suitable materials based on Sanyos technology for fabricating high-quality a-Si solar cells to obtain higher build-in potential and control the junction properties, and have been studying how to treat the surface to create a good interface without introducing any damage. We will continue our efforts to obtain even higher levels of conversion efficiency by using the high potential that this structure has.

Multi-source power supply system using micro-photovoltaic devices combined with microwave antenna

This paper reports a new power supply system that uses light and microwave simultaneously, to supply high- and multiple-voltages for MEMS (Micro Electro Mechanical Systems). This energy conversion device has been newly developed by integrating micro-photovoltaic devices and microwave antenna that are designed to minimize the interference between them. The micro-photovoltaic devices can generate high voltages (up to 100 V), because a number of tiny thin-film photovoltaic cells are interconnected in series. On the other hand, large currents can be provided with low voltages when the microwave antenna is used. The characteristics of both the micro-photovoltaic devices and microwave antenna were evaluated simultaneously by light and microwave supply system. As a result, the maximum voltage and current for the micro-photovoltaic device were found to be 101 V and 88 /spl mu/A, respectively. The voltage and current for the microwave conversion device (microwave antenna+RF module) were found to be 4.5 V and 74 mA, respectively. Additionally, the high output voltages from the micro-photovoltaic devices could be stabilized by originally designed voltage-stabilizing circuits.