Senji Wada
Samsung
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Senji Wada.
Meeting Abstracts | 2008
Senji Wada; Tetsuji Abe; Atsushi Sakurai; Takashi Higashino; Ryuusaku Fujimoto; Masako Shimizu
Scaling down of semiconductor device size has required a several kind of new elements. Recently, Hfbased metal gate has been used instead of the traditional poly silicon. There always are the potential demands for new precursors and we have supply a variety of precursors. For example, Adelmann et al used our rare earth precursors to the gate insulator. Recently, we have announced HMBO or ZMBO (3). Those precursors are designed for providing pure hafnium or zirconium oxide (HfO2 or ZrO2).
216th ECS Meeting | 2009
Senji Wada; Atsushi Sakurai; Naoki Yamada; Tsuyoshi Watanabe; Hiroyuki Uchiuzo
Archive | 2008
Naoki Yamada; Atsuya Yoshinaka; Senji Wada
Archive | 2014
Senji Wada; Akio Saito; Tomoharu Yoshino
Archive | 2007
Senji Wada; Tetsuji Abe; Atsushi Sakurai; Takashi Higashino; Ryusaku Fujimoto; Masako Shimizu
Archive | 2001
Kazuhisa Onozawa; Senji Wada; Atsuya Yoshinaka; 仙二 和田; 和久 小野沢; 篤也 芳仲
Archive | 2008
Naoki Yamada; Atsuya Yoshinaka; Senji Wada
Archive | 2003
Katsuhide Seki; Senji Wada; Atsuya Yoshinaka; 仙二 和田; 篤也 芳仲; 克英 関
Archive | 2014
Youn-Joung Cho; Senji Wada; Jung-Sik Choi; Jin-Seo Lee; Atsushi Sakurai; Kyoo-chul Cho; Atsuya Yoshinaka; Haruyoshi Sato; Junji Ueyama; Tomoharu Yoshino; Masako Shimizu
Archive | 2012
Tetsuji Abe; Senji Wada; Atsushi Sakurai; Takashi Higashino; Ryusaku Fujimoto; Masako Shimizu
