Seung-hyuk Choi
Samsung
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Publication
Featured researches published by Seung-hyuk Choi.
international interconnect technology conference | 2013
Kyu-hee Han; Seungwook Choi; Tae Jin Yim; Seung-hyuk Choi; Jongmin Baek; Sang-hoon Ahn; Nae-In Lee; Si-Young Choi; Ho-Kyu Kang; Eunseung Jung
In order to address the increasing RC and reliability challenges at the advanced technology nodes, a new robust ULK was developed that incorporates the bridging carbon atoms (Si-[CH2]x-Si) in p-SiOCH matrix. Its elastic modulus and plasma damage resistance were improved more than 40% at the same dielectric constant than the commercially available ULK. These improvements are attributed to 80% higher atoms that exist in both Si-[CH2]x-Si and Si-CH3 structures with its pore size 23% smaller. Furthermore, its superb properties resulted in 3~4% capacitance reduction, and improvement of TDDB and EM TTF (time to failure) by 2 order and 2~3 times, respectively, on an advanced BEOL vehicle.
Archive | 2011
Seung-hyuk Choi; In-Hyuk Song
Archive | 2011
Sung-Bin Im; Jong-ho Lea; Young-Hwan Lee; Seung-hyuk Choi; Sang-Wook Cho; Chi-Won Kim; Soo-yeoun Yoon; Sang-wook Kang; Su-gyeong Hyeon
Archive | 2009
Seung-hyuk Choi; Seung-seop Shim; Moon-Seok Han
Archive | 2013
Seung-hyuk Choi; Seung-seop Shim; Moon-Seok Han; Joon-hyuk Ryu
Archive | 2013
Seung-hyuk Choi; Seung-seop Shim; Moon-Seok Han; Joon-hyuk Ryu
Archive | 2009
Seung-hyuk Choi; Seung-seop Shim; Moon-Seok Han; Joon-hyuk Ryu
Archive | 2009
Seung-hyuk Choi; Seung-seop Shim; Moon-Seok Han
Archive | 2014
Seung-hyuk Choi; In-Hyuk Song
Archive | 2011
Sung-Bin Im; Jong-ho Lea; Young-Hwan Lee; Seung-hyuk Choi; Sang-Wook Cho; Chi-Won Kim; Soo-yeoun Yoon; Sang-wook Kang; Su-gyeong Hyeon