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Shantinath Ghongadi

Lam Research

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Publication

Featured researches published by Shantinath Ghongadi.

Archive | 2007

Rapidly cleanable electroplating cup assembly

Shantinath Ghongadi; Robert Rash; Jeff Hawkins; Seshasayee Varadarajan; Tariq Majid; Kousik Ganesan; Bryan L. Buckalew; Brian Evans

Archive | 2009

Wafer electroplating apparatus for reducing edge defects

Vinay Prabhakar; Bryan L. Buckalew; Kousik Ganesan; Shantinath Ghongadi; Zhian He; Steven T. Mayer; Robert Rash; Jonathan D. Reid; Yuichi Takada; James R. Zibrida

Archive | 2007

Closed contact electroplating cup assembly

Robert Rash; Shantinath Ghongadi; Kousik Ganesan; Zhian He; Tariq Majid; Jeff Hawkins; Seshasayee Varadarajan; Bryan L. Buckalew

Archive | 2011

CONFIGURATION AND METHOD OF OPERATION OF AN ELECTRODEPOSITION SYSTEM FOR IMPROVED PROCESS STABILITY AND PERFORMANCE

Kousik Ganesan; Tighe A. Spurlin; Jonathan D. Reid; Shantinath Ghongadi; Andrew J. McKerrow; James E. Duncan

Archive | 2012

Plating method and apparatus with multiple internally irrigated chambers

Steven T. Mayer; Shantinath Ghongadi; Kousik Ganesan; Zhian He; Jingbin Feng

Archive | 2011

Electroplating cup assembly

Robert Rash; Shantinath Ghongadi; Kousik Ganesan; Zhian He; Tariq Majid; Jeff Hawkins; Seshasayee Varadarajan; Bryan L. Buckalew

Archive | 2011

Rapidly cleanable electroplating cup seal

Shantinath Ghongadi; Robert Rash; Jeff Hawkins; Seshasayee Varadarajan; Tariq Majid; Kousik Ganesan; Bryan L. Buckalew; Brian Evans

Archive | 2012

Plating cup with contoured cup bottom

Zhian He; Jingbin Feng; Shantinath Ghongadi; Frederick Dean Wilmot

Archive | 2010

FRONT REFERENCED ANODE

Jingbin Feng; R. Marshall Stowell; Shantinath Ghongadi; Zhian He; Frederick Dean Wilmot

Archive | 2013

Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyte

Tighe A. Spurlin; Charles L. Merrill; Ludan Huang; Matthew Thorum; Lee Brogan; James E. Duncan; Frederick Dean Wilmot; Marshall R. Stowell; Steven T. Mayer; Haiying Fu; David W. Porter; Shantinath Ghongadi; Jonathan D. Reid; Hyosang S. Lee; Mark J. Willey

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Collaboration

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Zhian He

Lam Research

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Tariq Majid

Lam Research

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Bryan L. Buckalew

Lam Research

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Robert Rash

Lam Research

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Ludan Huang

Lam Research

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Seshasayee Varadarajan

Lam Research

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Steven T. Mayer

Lawrence Livermore National Laboratory

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Jingbin Feng

IBM

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Jonathan D. Reid

IBM

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Haiying Fu

Lam Research

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