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Publication


Featured researches published by Shibata Fumio.


Archive | 1996

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

Kakehi Yutaka; Nakazato Norio; Fukushima Yoshimasa; Shibata Fumio; Tsubone Tsunehiko; Kanai Norio


Archive | 1986

CONTROL METHOD OF TEMPERATURE OF WAFER

Shibata Fumio; Yamamoto Noriaki; Kanai Norio; Fukuda Sumio; Tsubone Tsunehiko


Archive | 1983

MANUFACTURING DEVICE OF SEMICONDUCTOR

Kanai Norio; Nagatomo Katsuaki; Shibata Fumio; Harada Kunio


Archive | 1986

SUBSTRATE AFTER-TREATMENT DEVICE

Kanai Norio; Shibata Fumio; Kawasaki Yoshinao


Archive | 1985

METHOD FOR MICROWAVE PLASMA TREATMENT

Yamamoto Noriaki; Shibata Fumio; Tsubone Tsunehiko; Kaneko Yutaka


Archive | 1983

WAFER PUSH-UP DEVICE

Kudou Katsuyoshi; Shibata Fumio; Kanai Norio


Archive | 1996

SAMPLE HOLDING METHOD FOR PLASMA TREATMENT APPARATUS

Kakehi Yutaka; Nakazato Norio; Fukushima Yoshimasa; Hiratsuka Yukiya; Shibata Fumio; Yamamoto Noriaki; Tsubone Tsunehiko


Archive | 1986

CONVEYOR FOR SAMPLE

Kanai Norio; Shibata Fumio; Fukuda Sumio; Yamamoto Noriaki; Tsubone Tsunehiko


Archive | 1983

WAFER TRANSFERRING APPARATUS

Kanai Norio; Nagatomo Katsuaki; Shibata Fumio; Katou Shigekazu


Archive | 1998

VACUUM PROCESSOR AND SEMICONDUCTOR SUBSTRATE PROCESSING METHOD

Kakehi Yutaka; Nakazato Norio; Fukushima Yoshimasa; Shibata Fumio; Tsubone Tsunehiko; Kanai Norio

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