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Dive into the research topics where Tsubone Tsunehiko is active.

Publication


Featured researches published by Tsubone Tsunehiko.


Archive | 1996

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

Kakehi Yutaka; Nakazato Norio; Fukushima Yoshimasa; Shibata Fumio; Tsubone Tsunehiko; Kanai Norio


Archive | 2007

SAMPLE PLACING ELECTRODE AND PLASMA PROCESSING APPARATUS EMPLOYING SAME

Yoshioka Takeshi; Omoto Yutaka; Tsubone Tsunehiko


Archive | 2006

WAFER PROCESSOR AND WAFER PROCESSING METHOD

Sugano Seiichiro; Tanaka Junichi; Miya Takeshi; Tsubone Tsunehiko; Makino Akitaka; Masuda Toshio


Archive | 1994

POWER FAILURE TREATMENT DEVICE FOR SEMICONDUCTOR PROCESSING EQUIPMENT

Nishihata Koji; Tamura Naoyuki; Kato Shigekazu; Tsubone Tsunehiko; Ito Atsushi


Archive | 1986

CONTROL METHOD OF TEMPERATURE OF WAFER

Shibata Fumio; Yamamoto Noriaki; Kanai Norio; Fukuda Sumio; Tsubone Tsunehiko


Archive | 2008

ELECTRODE FOR PLACING WAFER

Shirayone Shigeru; Omoto Yutaka; Tsubone Tsunehiko; Aramaki Toru


Archive | 1999

SHEET TYPE VACUUM TREATING METHOD AND DEVICE

Yagi Katsuji; Tsubone Tsunehiko; Kawahara Hironori; Soraoka Minoru; Makino Akitaka; Nagayasu Nobuo


Archive | 1992

DETECTION OF TEMPERATURE

Ito Yoichi; Tsubone Tsunehiko


Archive | 2005

METHOD AND DEVICE FOR WAFER PROCESSING

Sugano Seiichiro; Kazumi Hideyuki; Tsubone Tsunehiko; Kikkai Motohiko; Aramaki Toru; Sumiya Masanori


Archive | 2000

SUBSTRATE TRANSFER SYSTEM FOR VACUUM TREATMENT DEVICE

Kato Shigekazu; Nishihata Koji; Tsubone Tsunehiko; Ito Atsushi

Collaboration


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