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Shich-Chang Suen

TSMC

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Publication

Featured researches published by Shich-Chang Suen.

Archive | 2015

MECHANISM FOR FORMING METAL GATE STRUCTURE

Chi-Jen Liu; Li-Chieh Wu; Shich-Chang Suen; Liang-Guang Chen

Archive | 2013

Apparatus and method of manufacturing metal gate semiconductor device

Chi-Jen Liu; Chih-Chung Chang; Li-Chieh Wu; Shich-Chang Suen; Liang-Guang Chen

Archive | 2016

Method for cleaning metal gate surface

Shich-Chang Suen; Li-Chieh Wu; Chi-Jen Liu; He Hui Peng; Liang-Guang Chen; Yung-Chung Chen

Archive | 2013

Oxidation and Etching Post Metal Gate CMP

Chi-Jen Liu; Li-Chieh Wu; Shich-Chang Suen; Liang-Guang Chen

Archive | 2013

Mechanisms for removing debris from polishing pad

He-Hui Peng; Fu-Ming Huang; Shich-Chang Suen; Han-Hsin Kuo; Chi-Ming Tsai; Liang-Guang Chen

Archive | 2013

METHODS AND SYSTEMS FOR CHEMICAL MECHANICAL POLISH AND CLEAN

Shich-Chang Suen; Chi-Jen Liu; Ying-Liang Chuang; Li-Chieh Wu; Liang-Guang Chen; Ming-Liang Yen

Archive | 2013

Polishing Head, Chemical-Mechanical Polishing System, and Method for Polishing Substrate

Shich-Chang Suen; Chin-Hsiang Chan; Liang-Guang Chen; Yung-Cheng Lu

Archive | 2011

Semiconductor Device Surface Clean

Shich-Chang Suen; He Hui Peng; Liang-Guang Chen

Archive | 2011

Process for Forming Contact Plugs

Shich-Chang Suen; Liang-Guang Chen; He Hui Peng; Wne-Pin Peng; Shwang-Ming Jeng

Archive | 2016

METHOD FOR OPERATING A POLISHING HEAD AND METHOD FOR POLISHING A SUBSTRATE

Shich-Chang Suen; Chin-Hsiang Chan; Liang-Guang Chen; Yung-Cheng Lu

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Collaboration

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Liang-Guang Chen

TSMC

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Chi-Jen Liu

TSMC

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Li-Chieh Wu

TSMC

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He Hui Peng

TSMC

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Chin-Hsiang Chan

TSMC

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Yung-Cheng Lu

TSMC

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Yung-Chung Chen

TSMC

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Ming-Liang Yen

TSMC

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Ying-Liang Chuang

TSMC

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Chi-Ming Tsai

TSMC

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