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Dive into the research topics where Shigeki Tozawa is active.

Publication


Featured researches published by Shigeki Tozawa.


Archive | 1993

Plasma etching system

Kazushi Tomita; Yoshikazu Ito; Motohiro Hirano; Akira Nozawa; Hiromitsu Matsuo; Shunichi Iimuro; Shigeki Tozawa; Yutaka Miura


Archive | 2000

Magnetron plasma processing apparatus

Kazuhiro Kubota; Shigeki Tozawa; Jun Hirose; Akira Koshiishi; Tomomi Kondo


Archive | 1996

Anisotropic etching method and apparatus

Masayuki Kojima; Yoshikazu Ito; Kazushi Tomita; Shigeki Tozawa; Shunichi Iimuro; Masashi Arasawa; Eiichi Nishimura


Archive | 1995

Plasma etching system and plasma etching method

Kazushi Tomita; Yoshikazu Ito; Motohiro Hirano; Akira Nozawa; Hiromitsu Matsuo; Shunichi Iimuro; Shigeki Tozawa; Yutaka Miura


Archive | 2001

Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator

Koji Miyata; Jun Hirose; Akira Kodashima; Shigeki Tozawa; Kazuhiro Kubota; Yuki Chiba


Archive | 2007

GAS PROCESSING APPARATUS, GAS PROCESSING METHOD, AND STORAGE MEDIUM

Yusuke Muraki; Shigeki Tozawa


Archive | 2009

Substrate processing method and system

Shigeki Tozawa


Archive | 2009

THERMAL PROCESSING APPARATUS AND PROCESSING SYSTEM

Tadashi Onishi; Shigeki Tozawa; Yusuke Muraki; Takafumi Nitoh


Archive | 2008

Etching of silicon oxide film

Shigeki Tozawa; Yusuke Muraki


Archive | 2006

Decompression processing apparatus

Tadashi Iino; Yusuke Muraki; Shigeki Tozawa; 茂樹 戸澤; 雄介 村木; 正 飯野

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