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Kazuhiro Kubota

Tokyo Electron

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Publication

Featured researches published by Kazuhiro Kubota.

Archive | 2000

Magnetron plasma processing apparatus

Kazuhiro Kubota; Shigeki Tozawa; Jun Hirose; Akira Koshiishi; Tomomi Kondo

Archive | 2008

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM

Kazuhiro Kubota; Shigeru Tahara; Ryuichi Asako

Archive | 2001

Magnetic field generator for magnetron plasma, and plasma etching apparatus and method comprising the magnetic field generator

Koji Miyata; Jun Hirose; Akira Kodashima; Shigeki Tozawa; Kazuhiro Kubota; Yuki Chiba

Archive | 2007

Method of repairing damaged film having low dielectric constant, semiconductor device fabricating system and storage medium

Masaru Hori; Kazuhiro Kubota

Archive | 2008

Processing method and storage medium

Kazuhiro Kubota; Naotsugu Hoshi; Yuki Chiba; Ryuichi Asako

Archive | 2011

APPARATUS FOR MANUFACTURING A SEMICONDUCTOR DEVICE

Satoru Shimura; Kazuhiro Kubota; Ryuichi Asako; Seiichi Takayama

Archive | 2010

Processing method for recovering a damaged low-k film of a substrate and storage medium

Wataru Shimizu; Kazuhiro Kubota; Daisuke Hayashi

Archive | 2007

METHOD FOR DETECTING AN END POINT OF RESIST PEELING, METHOD AND APPARATUS FOR PEELING RESIST, AND COMPUTER-READABLE STORAGE MEDIUM

Isamu Sakuragi; Kazuhiro Kubota

Archive | 2015

Plasma etching method and semiconductor device manufacturing method

Kazuhiro Kubota; Masanobu Honda; Takayuki Katsunuma

Archive | 2013

METHOD OF FORMING A PATTERN AND SUBSTRATE PROCESSING SYSTEM

Kazuhiro Kubota; Ryukichi Shimizu

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Collaboration

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Shigeki Tozawa

Tokyo Electron

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Ryuichi Asako

Tokyo Electron

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Yuki Chiba

Tokyo Electron

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Eiichi Nishimura

Tokyo Electron

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Jun Hirose

Tokyo Electron

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Masaru Hori

Tokyo Electron

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Akira Koshiishi

Tokyo Electron

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Daisuke Hayashi

Tokyo Electron

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Hikaru Watanabe

Tokyo Electron

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Isamu Sakuragi

Tokyo Electron

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