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Shigeru Harada

Mitsubishi

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Publication

Featured researches published by Shigeru Harada.

Archive | 1987

Apparatus for forming a thin film

Shigeru Harada; Takeshi Noguchi; Hiroshi Mochizuki

Archive | 1992

SEMICONDUCTOR DEVICE HAVING MULTILAYER INTERCONNECTION STRUCTURE

Hiroyuki Fujii; Shigeru Harada

Archive | 2000

Semiconductor device and fabrication process therefor

Shigeru Harada; Takeru Matsuoka; Hiroki Takewaka

Archive | 2002

Semiconductor device having a multilayer interconnection structure

Hiroyuki Nishimura; Hiroshi Adachi; Etsushi Adachi; Shigeyuki Yamamoto; Shintaro Minami; Shigeru Harada; Toru Tajima; Kimio Hagi

Archive | 1993

Method of manufacturing semiconductor device having multilayer interconnection structure

Hiroyuki Fujii; Shigeru Harada

Archive | 1992

Semiconductor device having a titanium and a titanium compound multilayer interconnection structure

Shigeru Harada; Kazuhiro Ishimaru; Kimio Hagi

Archive | 1994

Semiconductor device with bonding pad electrode

Shigeru Harada; Takemi Endoh; Tomohiro Ishida

Archive | 2002

Semiconductor device having a multilayer wiring structure and pad electrodes protected from corrosion, and method for fabricating the same

Shigeru Harada; Yoshifumi Takata; Junko Izumitani

Archive | 1988

Chemical vapor deposition apparatus having cooling heads adjacent to gas dispersing heads in a single chamber

Shigeru Harada; Masanori Obata; Eisuke Tanaka; Kenji Kishibe

Archive | 1992

Process of passivating a semiconductor device bonding pad by immersion in O2 or O3 solution

Shigeru Harada; Kimio Hagi; Kiyoaki Tsumura

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Collaboration

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Noriaki Fujiki

Mitsubishi

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Kimio Hagi

Mitsubishi

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Junichi Arima

Mitsubishi

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Eisuke Tanaka

Mitsubishi

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Etsushi Adachi

Mitsubishi Electric

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Hiroshi Adachi

Mitsubishi

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Hiroshi Mochizuki

Mitsubishi

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Kenji Kishibe

Mitsubishi

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Tomohiro Ishida

Mitsubishi

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Takashi Yamashita

Mitsubishi

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