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Kimio Hagi

Mitsubishi

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Publication

Featured researches published by Kimio Hagi.

Archive | 2002

Semiconductor device having a multilayer interconnection structure

Hiroyuki Nishimura; Hiroshi Adachi; Etsushi Adachi; Shigeyuki Yamamoto; Shintaro Minami; Shigeru Harada; Toru Tajima; Kimio Hagi

Archive | 1992

Semiconductor device having a titanium and a titanium compound multilayer interconnection structure

Shigeru Harada; Kazuhiro Ishimaru; Kimio Hagi

Archive | 1992

Process of passivating a semiconductor device bonding pad by immersion in O2 or O3 solution

Shigeru Harada; Kimio Hagi; Kiyoaki Tsumura

Archive | 1994

Method of forming an interconnection structure

Shigeru Harada; Kazuhiro Ishimaru; Kimio Hagi

Archive | 1997

Semiconductor device whose flattening resin film component has a controlled carbon atom content

Hiroyuki Nishimura; Hiroshi Adachi; Etsushi Adachi; Shigeyuki Yamamoto; Shintaro Minami; Shigeru Harada; Toru Tajima; Kimio Hagi

Archive | 1999

Semiconductor device capable of preventing disconnection in a through hole

Yuuko Ookuma; Kimio Hagi

Archive | 1992

Interconnecting aluminium@ metallisation layers in semiconductor integrated circuit - involves forming barrier layer on first aluminium@ layer and sequence of titanium@ layer, barrier layer and aluminium@ layer as second metallisation

Shigeru Harada; Kazuhiro Ishimaru; Kimio Hagi

Archive | 1993

Semiconductor device e.g. DRAM mfr. - involves hole-free passive oxide film prodn. on bonding pad

Shigeru Harada; Kimio Hagi; Kiyoaki Tsumura

Archive | 1999

Adjustment mark for detecting location of coupling layer on insulation layer of semiconductor component

Noboru Sekiguchi; Kimio Hagi; Mitsuo Kimoto

Archive | 1999

Semiconductor device, and method and device for manufacture thereof

Kimio Hagi; Hiroko Okuma; 裕子 大隈; 公男 萩

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Collaboration

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Shigeru Harada

Mitsubishi

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Kazuhiro Ishimaru

Mitsubishi

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Etsushi Adachi

Mitsubishi Electric

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Hiroshi Adachi

Mitsubishi Electric

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Hiroyuki Nishimura

Mitsubishi

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Kiyoaki Tsumura

Mitsubishi

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Mitsuo Kimoto

Mitsubishi

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Noboru Sekiguchi

Mitsubishi

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Shigeyuki Yamamoto

Mitsubishi Electric

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Toru Tajima

Mitsubishi

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