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Shigeru Serikawa

Hitachi

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Publication

Featured researches published by Shigeru Serikawa.

Archive | 2008

Method and apparatus for inspecting surface defect

Takayuki Ishiguro; Shigeru Serikawa; Minoru Yoshida; 実 吉田; 隆之 石黒; 滋 芹川

Archive | 2008

Surface defect inspecting apparatus with defect detection optical system and defect-detected image processing

Tatsuo Hariyama; Minoru Yoshida; Shigeru Serikawa

Archive | 2009

METHOD AND DEVICE FOR DETECTING SHAPE OF SURFACE OF MEDIUM

Minoru Yoshida; Takenori Hirose; Hideaki Sasazawa; Shigeru Serikawa

Archive | 2009

METHOD AND APPARATUS FOR DETECTING DEFECTS ON A DISK SURFACE

Tatsuo Hariyama; Hideaki Sasazawa; Minoru Yoshida; Shigeru Serikawa

Archive | 2008

Method and apparatus for inspecting a surface of a specimen

Minoru Yoshida; Takayuki Ishiguro; Shigeru Serikawa

Archive | 2007

MEASURING METHOD OF OPTICAL HETERODYNE INTERFERENCE AND A MEASURING APPARATUS THEREOF

Shigeru Serikawa

Archive | 1999

Interference detecting system for use in interferometer

Tuneo Yamaba; Kenji Aikou; Shigeru Serikawa; Hideo Ishimori

Archive | 2013

OPTICAL SURFACE DEFECT INSPECTION APPARATUS AND OPTICAL SURFACE DEFECT INSPECTION METHOD

Shigeru Serikawa; Kiyotaka Horie; Yu Yanaka; Farizbin Abdulrashid

Archive | 2011

Pattern shape inspection instrument and pattern shape inspection method, instrument for inspecting stamper for patterned media and method of inspecting stamper for patterned media, and patterned media disk manufacturing line

Shigeru Serikawa; Ryuta Suzuki; Toshiaki Sugita; Kiyotaka Horie

Archive | 2010

DISK SURFACE DEFECT INSPECTION METHOD AND APPARATUS

Bin Abdulrashid Fariz; Yu Yanaka; Keiji Kato; Takayuki Ishiguro; Shigeru Serikawa

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Hideaki Sasazawa

Hitachi

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Minoru Yoshida

Hitachi

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Takayuki Ishiguro

Hitachi

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Kiyotaka Horie

Hitachi

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Yu Yanaka

Hitachi

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Takenori Hirose

Hitachi

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Tatsuo Hariyama

Hitachi

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Ryuta Suzuki

Hitachi

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Bin Abdulrashid Fariz

Hitachi

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Keiji Kato

Hitachi

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