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Takenori Hirose

Hitachi

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Publication

Featured researches published by Takenori Hirose.

Archive | 2002

Method and apparatus for measuring thickness of thin film and device manufacturing method using same

Mineo Nomoto; Takenori Hirose; Keiya Saito

Archive | 1999

Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same

Takenori Hirose; Minori Noguchi; Yukio Kenbo; Shunji Maeda; Takanori Ninomiya; Hirofumi Tsuchiyama

Archive | 2001

Method of detecting and measuring endpoint of polishing processing and its apparatus and method of manufacturing semiconductor device using the same

Takenori Hirose; Mineo Nomoto; Hiroyuki Kojima; Hidemi Sato

Archive | 2001

Polishing pad surface condition evaluation method and an apparatus thereof and a method of producing a semiconductor device

Takenori Hirose; Hiroyuki Kojima; Mineo Nomoto; Susumu Aiuchi

Archive | 2009

METHOD AND DEVICE FOR DETECTING SHAPE OF SURFACE OF MEDIUM

Minoru Yoshida; Takenori Hirose; Hideaki Sasazawa; Shigeru Serikawa

Archive | 2002

Film thickness measuring method and apparatus, and thin film device manufacturing method and manufacturing apparatus using same

Takenori Hirose; Mineo Nomoto

Archive | 2002

Method of polishing a film

Takenori Hirose; Mineo Nomoto; Hiroyuki Kojima; Hidemi Sato

Archive | 2009

SPECTRAL DETECTION METHOD AND DEVICE, AND DEFECT INSPECTION METHOD AND APPARATUS USING THE SAME

Takenori Hirose; Minoru Yoshida; Hideaki Sasazawa; Yasuhiro Yoshitake

Archive | 2004

Method and apparatus for measuring depth of holes formed on a specimen

Masahiro Watanabe; Takenori Hirose; Yukio Kembo; Yoshiyuki Nagano; Takafumi Morimoto

Archive | 2002

Method and apparatus for managing surface image of thin film device, and method and apparatus for manufacturing thin film device using the same

Takenori Hirose; Mineo Nomoto

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Collaboration

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Masahiro Watanabe

Hitachi

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Hideaki Sasazawa

Hitachi

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Kaifeng Zhang

Hitachi

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Mineo Nomoto

Hitachi

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Keiya Saito

Hitachi

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Shigeru Serikawa

Hitachi

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Minoru Yoshida

Hitachi

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Teruaki Tokutomi

Hitachi

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Tsuneo Nakagomi

Hitachi

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Hirofumi Tsuchiyama

Hitachi

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