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Shigeta Atsushi

Ebara Corporation

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Publication

Featured researches published by Shigeta Atsushi.

Archive | 1994

SLIP-OFF PREVENTING RING FOR POLISHING DEVICE

Okumura Katsuya; Watanabe Toru; Aoki Riichiro; Yano Hiroyuki; Kodera Masako; Shigeta Atsushi; Ishii Yu; Kimura Norio; Hirose Masayoshi; Tsujimura Manabu

Archive | 1993

Polishing method for planarizing layer on a semiconductor wafer

Kodera Masako; Yano Hiroyuki; Shigeta Atsushi; Aoki Riichirou; Yajima Hiromi; Okano Haruo

Archive | 2005

METHOD FOR CHEMICALLY AND MECHANICALLY POLISHING SLURRY FOR ORGANIC FILM AND ORGANIC FILM

Matsui Yukiteru; Minami Fukugaku; Shigeta Atsushi; Yano Hiroyuki

Archive | 2007

PERIPHERAL PROCESSING METHOD AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

Kubota Takeo; Shigeta Atsushi; Kusahara Kaori; Honda Akira; Ezawa Hirokazu

Archive | 2009

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

Fukushima Masaru; Shigeta Atsushi

Archive | 2008

POLISHING METHOD FOR SEMICONDUCTOR WAFER, AND POLISHING DEVICE FOR SEMICONDUCTOR WAFER

Kubota Takeo; Shigeta Atsushi; Fukushima Masaru

Archive | 2007

CHEMICAL MECHANICAL POLISHING SLURRY FOR ORGANIC FILM POLISHING, CHEMICAL MECHANICAL POLISHING METHOD, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

Shida Hirotaka; Matsui Yukiteru; Shigeta Atsushi; Hirasawa Shinichi; Kato Hirokazu; Kinoshita Masako; Nishioka Takeshi; Yano Hiroyuki

Archive | 2002

CHEMICAL MECHANICAL POLISHING TREATMENT SYSTEM AND CHEMICAL MECHANICAL POLISHING METHOD

Kubota Takeo; Shigeta Atsushi; Yano Hiroyuki

Archive | 1997

POLISHING END POINT DETERMINING METHOD AND DEVICE THEREOF

Takahashi Yoshimizu; Sakata Fumihiko; Kimura Norio; Kodera Masako; Shigeta Atsushi

Archive | 1996

Verfahren und Vorrichtung für die Reinigung von Werkstücken

Maekawa Tashiro; Hamada Satomi; Ono Koji; Shigeta Atsushi; Kodera Masako

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Kodera Masako

Ebara Corporation

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Aoki Riichiro

Ebara Corporation

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Yajima Hiromi

Ebara Corporation

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Yano Hiroyuki

Toshiba

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Mishima Shiro

Ebara Corporation

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Kimura Norio

Ebara Corporation

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Hirose Masayoshi

Ebara Corporation

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Matsui Yukiteru

Toshiba

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Okumura Katsuya

Toshiba

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Tsujimura Manabu

Ebara Corporation

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