Shin Hur

Emission enhancement of sound emitters using an acoustic metamaterial cavity.

The emission enhancement of sound without electronic components has wide applications in a variety of remote systems, especially when highly miniaturized (smaller than wavelength) structures can be used. The recent advent of acoustic metamaterials has made it possible to realize this. In this study, we propose, design, and demonstrate a new class of acoustic cavity using a double-walled metamaterial structure operating at an extremely low frequency. Periodic zigzag elements which exhibit Fabry-Perot resonant behavior below the phononic band-gap are used to yield strong sound localization within the subwavelength gap, thus providing highly effective emission enhancement. We show, both theoretically and experimentally, 10 dB sound emission enhancement near 1060 Hz that corresponds to a wavelength approximately 30 times that of the periodicity. We also provide a general guideline for the independent tuning of the quality factor and effective volume of acoustic metamaterials. This approach shows the flexibility of our design in the efficient control of the enhancement rate.

Development of a multi-channel piezoelectric acoustic sensor based on an artificial basilar membrane.

In this research, we have developed a multi-channel piezoelectric acoustic sensor (McPAS) that mimics the function of the natural basilar membrane capable of separating incoming acoustic signals mechanically by their frequency and generating corresponding electrical signals. The McPAS operates without an external energy source and signal processing unit with a vibrating piezoelectric thin film membrane. The shape of the vibrating membrane was chosen to be trapezoidal such that different locations of membrane have different local resonance frequencies. The length of the membrane is 28 mm and the width of the membrane varies from 1 mm to 8 mm. Multiphysics finite element analysis (FEA) was carried out to predict and design the mechanical behaviors and piezoelectric response of the McPAS model. The designed McPAS was fabricated with a MEMS fabrication process based on the simulated results. The fabricated device was tested with a mouth simulator to measure its mechanical and piezoelectrical frequency response with a laser Doppler vibrometer and acoustic signal analyzer. The experimental results show that the as fabricated McPAS can successfully separate incoming acoustic signals within the 2.5 kHz–13.5 kHz range and the maximum electrical signal output upon acoustic signal input of 94 dBSPL was 6.33 mVpp. The performance of the fabricated McPAS coincided well with the designed parameters.

Directional Reflective Surface Formed via Gradient-Impeding Acoustic Meta-Surfaces

Artificially designed acoustic meta-surfaces have the ability to manipulate sound energy to an extraordinary extent. Here, we report on a new type of directional reflective surface consisting of an array of sub-wavelength Helmholtz resonators with varying internal coiled path lengths, which induce a reflection phase gradient along a planar acoustic meta-surface. The acoustically reshaped reflective surface created by the gradient-impeding meta-surface yields a distinct focal line similar to a parabolic cylinder antenna, and is used for directive sound beamforming. Focused beam steering can be also obtained by repositioning the source (or receiver) off axis, i.e., displaced from the focal line. Besides flat reflective surfaces, complex surfaces such as convex or conformal shapes may be used for sound beamforming, thus facilitating easy application in sound reinforcement systems. Therefore, directional reflective surfaces have promising applications in fields such as acoustic imaging, sonic weaponry, and underwater communication.

Sound Pressure Level Gain in an Acoustic Metamaterial Cavity

The inherent attenuation of a homogeneous viscous medium limits radiation propagation, thereby restricting the use of many high-frequency acoustic devices to only short-range applications. Here, we design and experimentally demonstrate an acoustic metamaterial localization cavity which is used for sound pressure level (SPL) gain using double coiled up space like structures thereby increasing the range of detection. This unique behavior occurs within a subwavelength cavity that is 1/10th of the wavelength of the incident acoustic wave, which provides up to a 13 dB SPL gain. We show that the amplification results from the Fabry-Perot resonance of the cavity, which has a simultaneously high effective refractive index and effective impedance. We also experimentally verify the SPL amplification in an underwater environment at higher frequencies using a sample with an identical unit cell size. The versatile scalability of the design shows promising applications in many areas, especially in acoustic imaging and underwater communication.

Mechanical and Electrical Characterization of Piezoelectric Artificial Cochlear Device and Biocompatible Packaging

This paper presents the development of a piezoelectric artificial cochlea (PAC) device capable of analyzing vibratory signal inputs and converting them into electrical signal outputs without an external power source by mimicking the function of human cochlea within an audible frequency range. The PAC consists of an artificial basilar membrane (ABM) part and an implantable packaged part. The packaged part provides a liquid environment through which incoming vibrations are transmitted to the membrane part. The membrane part responds to the transmitted signal, and the local area of the ABM part vibrates differently depending on its local resonant frequency. The membrane was designed to have a logarithmically varying width from 0.97 mm to 8.0 mm along the 28 mm length. By incorporating a micro-actuator in an experimental platform for the package part that mimics the function of a stapes bone in the middle ear, we created a similar experimental environment to cochlea where the human basilar membrane vibrates. The mechanical and electrical responses of fabricated PAC were measured with a laser Doppler vibrometer and a data acquisition system, and were compared with simulation results. Finally, the fabricated PAC in a biocompatible package was developed and its mechanical and electrical characteristics were measured. The experimental results shows successful frequency separation of incoming mechanical signal from micro-actuator into frequency bandwidth within the 0.4 kHz–5 kHz range.

Concentric artificial impedance surface for directional sound beamforming

Utilizing acoustic metasurfaces consisting of subwavelength resonant textures, we design an artificial impedance surface by creating a new boundary condition. We demonstrate a circular artificial impedance surface with surface impedance modulation for directional sound beamforming in three-dimensional space. This artificial impedance surface is implemented by revolving two-dimensional Helmholtz resonators with varying internal coiled path. Physically, the textured surface has inductive surface impedance on its inner circular patterns and capacitive surface impedance on its outer circular patterns. Directional receive beamforming can be achieved using an omnidirectional microphone located at the focal point formed by the gradient-impeding surface. In addition, the uniaxial surface impedance patterning inside the circular aperture can be used for steering the direction of the main lobe of the radiation pattern.

Two-chip MEMS capacitive microphone with CMOS analog amplifier

In this paper, we performed to develop two-chip MEMS capacitive microphone with CMOS analog amplifier. At first, we carried out multi-physics simulation to optimize the cutoff frequency and sensitivity of the designed MEMS microphone. Then MEMS microphone and CMOS analog preamplifier was fabricated and integrated. The acoustic sensitivity of developed MEMS microphone was measured with -41.3 dB.

pH Measurements with a Microcantilever Array-Based Biosensor System

In this paper, we present a pH measurement method that uses a microcantilever-array-based biosensor system. It is composed of microcantilever array, liquid cell, micro syringe pump, laser diode array, position sensitive detector, data acquisition device, and data processing software. Four microcantilevers are functionalized with pH-sensitive MHA(mercaptohexadecanoic acid) as a probe, while three microcantilevers are functionalized with HDT(hexadecane thiol) as reference. We prepare PBS(phosphate buffered saline) solutions of different pH and inject them into the liquid cell with a predefined volumetric speed at regular time intervals. The functionalized mircocantilevers in the liquid cell deflect as a self-assembled monolayer on the microcantilever binds with probe molecules in the solution. The difference in deflection between the MHA-covered probe microcantilever and the HDT-covered reference microcantilever was used to compensate for thermal drift. The deflection difference clearly increases with increasing pH in the solution. It was shown that when the pH values of the PBS solutions are high, there were large variations in the deflection of microcantilevers, whereas there were small variations for low pH value. The experimental results show that the microcantilever array functionalized with MHA and HDT can detect pH value with good repeatability.

Biomimetic acoustic sensor based on piezoelectric cantilever array

In this research, a biomimetic acoustic sensor that can mimic the functional properties of basilar membrane in mammalian cochlea was fabricated with PMN-PT piezoelectric cantilever array. The piezoelectric cantilever array with ten different lengths was designed to obtain different resonant frequencies. It was fabricated by semiconductor processes and was poled to generate an electrical signal from an audible sound source. The fabricated acoustic sensor was tested by experimental setup. As an experimental result, the resonant frequencies of each cantilever and corresponding electrical signals were measured from 490 Hz to 13,600 Hz and the displacement sensitivity was measured with the audible frequency range.

Development of Piezoelectric Artificial Cochlea Inspired by Human Hearing Organ

Miniaturized artificial hearing organ with excellent sensitivity and wide dynamic frequency range over human hearing range, while requiring small amount of energy, is important step to develop artificial systems interacting in human living space. This paper presents the development of piezoelectric artificial cochlea PAC capable of analyzing incoming vibratory signals over human hearing range without external power source. The design, component and function of PAC were inspired by those of human cochlea. The PAC was made of corona-poled piezoelectric thin film with vibrating membrane part of unique shape. The vibration displacement of membrane was measured using laser Doppler vibrometer and analyzed to show the frequency separation of the developed PAC. The experimental results of mechanical vibratory behavior demonstrated successful separation of incoming signals into 13 different frequency bands depending on their frequency over 300 Hz ~ 6,000 Hz.