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Shinichiro Aonuma

Toshiba

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Publication

Featured researches published by Shinichiro Aonuma.

Archive | 1999

Aluminum nitride sintered body, method of producing thereof, electrostatic chuck, susceptor, dummy wafer, clamp ring and particle catcher using the same

Mitsuhiro Fujita; Shinichiro Aonuma; Kouji Sano; Shigeko Muramatsu

Archive | 1999

Electrostatic chuck for heating and holding wafer

Shinichiro Aonuma; Mitsuhiro Fujita; Shigeko Matsumura; Koji Sano; 幸司 佐野; 滋子 松村; 光広 藤田; 伸一朗 青沼

Archive | 1999

Jointing agent for aluminum nitride sintered compact, method of jointing aluminum nitride sintered compact using the same, and production of plate heater and electrostatic chuck using the same

Shinichiro Aonuma; Shigeko Muramatsu; 滋子 村松; 伸一朗 青沼

Archive | 2003

Electrostatic chuck for holding wafer and manufacturing method thereof

Shinichiro Aonuma; Shigeko Muramatsu; 滋子 村松; 伸一朗 青沼

Archive | 2003

METHOD FOR JOINING TUNGSTEN, AND CERAMIC HEATER USING THE SAME

Shinichiro Aonuma; Shigeko Muramatsu; Koji Oishi; 浩司 大石; 滋子 村松; 伸一朗 青沼

Archive | 2000

Method of producing ceramic member for semiconductor treatment device

Shinichiro Aonuma; Mitsuhiro Fujita; Shigeko Muramatsu; 滋子 村松; 光広 藤田; 伸一朗 青沼

Archive | 2011

Composite ceramic and method for producing the same

Koichi Machida; Shinichiro Aonuma; 晃一 町田; 伸一朗 青沼

Archive | 2010

Method for producing fiber-reinforced ceramic composite material and fiber-reinforced ceramic composite material

Shinichiro Aonuma; Koichi Machida; 晃一 町田; 伸一朗 青沼

Archive | 1999

Aluminum nitride sintered body, its production, and electrostatic chuck, susceptor, dummy wafer, clamp ring and particle catcher bu using the same

Shinichiro Aonuma; Mitsuhiro Fujita; Shigeko Muramatsu; Koji Sano; 幸司 佐野; 滋子 村松; 光広 藤田; 伸一朗 青沼

Archive | 2017

SiC-SiC CMCs Using BN powder coated silicon carbide fibers

Eric Ness; Shinichiro Aonuma; Koichi Machida; Charles Lewinsohn

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Shigeko Muramatsu

Toshiba

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Mitsuhiro Fujita

Toshiba

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Koji Oishi

Toshiba

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Kouji Sano

Toshiba

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