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Mitsuhiro Fujita

Toshiba

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Publication

Featured researches published by Mitsuhiro Fujita.

Archive | 2001

Ceramics material and producing the same

Keiji Morita; Mitsuhiro Fujita; Haruo Murayama

Archive | 2002

Plasma-resistant member for semiconductor manufacturing apparatus and method for manufacturing the same

Mitsuhiro Fujita; Keiji Morita

Archive | 2001

Plasma resistant member and its manufacturing method

Katsuaki Aoki; Mitsuhiro Fujita; Akira Miyazaki; Takashi Morita; Eriko Nishimura; Shuichi Saito; Shunzo Shimai; Shunichi Suzuki; 晃 宮崎; 駿蔵 島井; 敬司 森田; 光広 藤田; 絵里子 西村; 俊一 鈴木; 克明 青木; 秀一 齋藤

Archive | 1999

Aluminum nitride sintered body, method of producing thereof, electrostatic chuck, susceptor, dummy wafer, clamp ring and particle catcher using the same

Mitsuhiro Fujita; Shinichiro Aonuma; Kouji Sano; Shigeko Muramatsu

Archive | 2006

TRANSPARENT YTTRIUM OXIDE SINTERED BODY AND MANUFACTURING METHOD THEREOF

Mitsuhiro Fujita; Masaki Irie; Yosuke Suzuki; 正樹 入江; 光広 藤田; 陽介 鈴木

Archive | 1999

Electrostatic chuck for heating and holding wafer

Shinichiro Aonuma; Mitsuhiro Fujita; Shigeko Matsumura; Koji Sano; 幸司 佐野; 滋子 松村; 光広 藤田; 伸一朗 青沼

Archive | 2005

Metal member-buried ceramics article and method of producing the same

Tomonori Uchimaru; Atsushi Arai; Shigeko Muramatsu; Shinichiro Aomura; Mitsuhiro Fujita; Susumu Kimijima; Keisuke Watanabe

Archive | 2006

Transparent rare-earth oxide sintered body and manufacturing method thereof

Mitsuhiro Fujita; Masaki Irie

Archive | 2004

Microwave heating ceramic heater for semiconductor substrates

Mitsuhiro Fujita; Koji Oishi; 浩司 大石; 光広 藤田

Archive | 2004

Electrostatic chuck made of aluminium nitride and its production process

Mitsuhiro Fujita; 光広 藤田

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Collaboration

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Shigeko Muramatsu

Toshiba

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Shinichiro Aonuma

Toshiba

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Keiji Morita

Toshiba

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Akira Miyazaki

Tokyo Electron

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Haruo Murayama

Toshiba

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Katsuaki Aoki

Toshiba

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Keisuke Watanabe

Sumitomo Chemical

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Koji Oishi

Toshiba

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Kouji Sano

Toshiba

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Seiichiro Hironaka

Tokyo Institute of Technology

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