Shinji Yamada

Direct Drawing of Ag Microwiring by Laser-Induced Pyrolysis of Film Prepared from Liquid-Dispersed Metal Nanoparticles

Ag microwiring with submicron resolution was fabricated by the laser-induced pyrolysis of a film prepared from liquid-dispersed Ag nanoparticles. The linewidth of the wiring fabricated by this laser direct-write maskless technique can be controlled flexibly by the laser beam focusing conditions. The resistivity of the Ag wiring fabricated by this technique (1.9×10-6 Ω cm) is comparable with that of bulk Ag (1.6×10-6 Ω cm).

Low Temperature Processing of Crystalline Lead Zirconate Titanate (PZT) Film and the Direct Micropatterning by Laser-Induced Pyrolysis of a Sol-Gel-Derived Film

A novel low-temperature processing of crystalline lead zirconate titanate (PZT) film was developed. The beam from an Ar ion laser was focused and scanned on the sol-gel derived film, and it induced pyrolysis of the precursor film with spatially selectivity. Development of the film using an acidic solution gave the PZT micropattern. The Raman spectrum of the micropattern exhibited the characteristics of crystalline PZT.

Direct Drawing of Submicrom Wiring By Laser-Induced Pyrolysis of Film Prepared from Liquid-Dispersed Metal Nanoparticles

The direct-drawing of submicron Ag wiring was achieved by laser-induced pyrolysis (LIP) of a precursor film prepared from liquid-dispersed Ag nanoparticles. This new method provided the micro-wiring by wet and maskless process toward printed electronics. The linewith of the Ag wiring was easily controlled by changing the objective lens magnifications and the focusing point. The resistivity of the Ag wiring fabricated by this technique (1.9 × 10−6 Ω cm) is comparable with that of bulk Ag (1.6 × 10−6 Ω cm).