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Shoichiro Matsuyama

Tokyo Electron

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Publication

Featured researches published by Shoichiro Matsuyama.

Archive | 2005

PLASMA PROCESSING APPARATUS, ELECTRODE PLATE FOR PLASMA PROCESSING APPARATUS, AND ELECTRODE PLATE MANUFACTURING METHOD

Katsuya Okumura; Shinji Himori; Kazuya Nagaseki; Hiroki Matsumaru; Shoichiro Matsuyama; Toshiki Takahashi

Archive | 2014

Plasma etching method and plasma etching device

Masanobu Honda; Kazuya Nagaseki; Koichiro Inazawa; Shoichiro Matsuyama; Hisataka Hayashi

Archive | 2004

Plasma treatment apparatus, electrode plate for plasma treatment apparatus and electrode plate manufacturing method

Shinji Himori; Hiroki Matsumaru; Shoichiro Matsuyama; Kazuya Nagaseki; Katsuya Okumura; Toshiki Takahashi; 勝弥 奥村; 弘樹 松丸; 昇一郎 松山; 慎司 檜森; 一也 永関; 俊樹 高橋

Archive | 2007

Stage for plasma processing apparatus, and plasma processing apparatus

Akira Koshiishi; Shinji Himori; Shoichiro Matsuyama

Archive | 2003

Method and device for plasma-etching organic material film

Masanobu Honda; Shoichiro Matsuyama; Kazuya Nagaseki; Hisataka Hayashi

Archive | 2011

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Shoichiro Matsuyama

Archive | 2007

Placement table for plasma treatment apparatus, and plasma treatment apparatus

Masaichi Higuma; Shinji Himori; Atsushi Matsuura; Shoichiro Matsuyama; 昇一郎 松山; 淳 松浦; 慎司 桧森; 政一 樋熊

Archive | 2011

Table for plasma processing apparatus and plasma processing apparatus

Masakazu Higuma; Shinji Himori; Shoichiro Matsuyama; Atsushi Matsuura

Archive | 2010

Plasma processing apparatus, electrode for plasma processing apparatus, and electrode manufacturing method

Kazuya Nagaseki; Shinji Himori; Toshiki Takahashi; Shoichiro Matsuyama; Hiroki Matsumaru; Katsuya Okumura

Archive | 2010

ELECTROSTATIC CHUCK AND SUBSTRATE PROCESSING APPARATUS HAVING SAME

Shoichiro Matsuyama

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Collaboration

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Shinji Himori

Tokyo Electron

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Kazuya Nagaseki

Tokyo Electron

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Hiroki Matsumaru

Tokyo Electron

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Katsuya Okumura

University of Tokyo

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Toshiki Takahashi

Tokyo Electron

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Masanobu Honda

Tokyo Electron

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Hisataka Hayashi

Tokyo Electron

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Akira Koshiishi

Tokyo Electron

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Atsushi Matsuura

Tokyo Electron

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Koichiro Inazawa

Tokyo Electron

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