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Shoji Kano

Shin-Etsu Chemical

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Publication

Featured researches published by Shoji Kano.

Archive | 1994

Ceramic electrostatic chuck with built-in heater

Nobuo Kawada; Shoji Kano; Koji Hagiwara; Nobuo Arai; Junichi Arami; Kenji Ishikawa

Archive | 2000

Ceramic heating jig

Shoji Kano; Kenji Ito; Akira Sato

Archive | 2003

Heating apparatus with electrostatic attraction function

Shoji Kano; Ryouji Iwai; Nobuo Arai

Archive | 1996

Vessel of pyrolytic boron nitride

Shoji Kano; Nobuo Kawada; Ryoji Nakajima; Yukio Kurosawa

Archive | 2003

Heating apparatus which has electrostatic adsorption function, and method for producing it

Shoji Kano; Kenji Satoh; Kenji Ito

Archive | 2008

Corrosion-resistant multilayer ceramic member

Shoji Kano; Waichi Yamamura; Yoshihiro Kubota

Archive | 2013

METHOD FOR COATING A GRAPHITE MATERIAL WITH PYROLYTIC BORON NITRIDE AND A COATED ARTICLE OBTAINED BY THAT METHOD

Shoji Kano

Archive | 2011

Method for forming an aluminum nitride thin film

Koji Kato; Shoji Kano; Waichi Yamamura

Archive | 2007

Electrostatic chuck apparatus

Shoji Kano; Waichi Yamamura

Archive | 2004

Wafer heating apparatus having electrostatic adsorption function

Shoji Kano; Noboro Gunma Complex Kimura; Akira Satoh; Kazuhiro Yamaguchi

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Waichi Yamamura

Shin-Etsu Chemical

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Kenji Satoh

Shin-Etsu Chemical

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Kenji Ito

East Tennessee State University

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Kenji Ito

East Tennessee State University

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Koji Kato

Shin-Etsu Chemical

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Nobuo Arai

Shin-Etsu Chemical

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Nobuo Kawada

Shin-Etsu Chemical

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Ryouji Iwai

Shin-Etsu Chemical

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Yoshihiro Kubota

Shin-Etsu Chemical

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Ryoji Nakajima

Shin-Etsu Chemical

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