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Shu Nakajima

Lam Research

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Publication

Featured researches published by Shu Nakajima.

Archive | 1999

Electrostatic chuck and its manufacturing method

Shu Nakajima; Yasushi Tanaka

Archive | 2001

Ceramic electrostatic chuck assembly and method of making

Shu Nakajima; Neil Benjamin

Archive | 2000

Apparatus and methods for actively controlling rf peak-to-peak voltage in an inductively coupled plasma etching system

Shu Nakajima

Archive | 2002

Electrostatic chuck and method for manufacturing the same

Shu Nakajima

Archive | 2000

Inductively coupled plasma etching apparatus

Shu Nakajima

Archive | 2007

Plasma stabilization method and plasma apparatus

Takumasa Nishida; Shu Nakajima

Archive | 2003

Water supply apparatus and method thereof

Naoaki Kobayashi; Ryuta Yamaguchi; Kaori Tajima; Kohsuke Ori; Eri Haikata; Shu Nakajima; Yoichi Isago; Kazuo Nojiri

Archive | 2001

Apparatus and method for supplying water

Naoaki Kobayashi; Shu Nakajima; Kazuo Nojiri; Yoichi Sagane; Teruo Saito; 州 中嶋; 直昭 小林; 輝夫 斎藤; 養一 砂金; 一男 野尻

Archive | 2002

Ceramic electrostatic chuck and method of fabricating same

Neil Benjamin; Shu Nakajima

Archive | 2006

Methods for cleaning a substrate

Yoichi Isago; Kazuo Nojiri; Naoaki Kobayashi; Teruo Saito; Shu Nakajima

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Neil Benjamin

Lam Research

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Kazuo Nojiri

Lam Research

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Naoaki Kobayashi

Lam Research

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Teruo Saito

Lam Research

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Yoichi Isago

Lam Research

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Kaori Tajima

Lam Research

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Ryuta Yamaguchi

Lam Research

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Takumasa Nishida

Lam Research

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Yasushi Tanaka

Lam Research

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Andrew Perry

Lam Research

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