Shuji Iwanaga

TEMPERATURE SETTING METHOD OF HEAT PROCESSING PLATE, TEMPERATURE SETTING APPARATUS OF HEAT PROCESSING PLATE, PROGRAM, AND COMPUTER-READABLE RECORDING MEDIUM RECORDING PROGRAM THEREON

Temperature setting method of heat treatment board, temperature setting device thereof, program and computer-readable recording medium for recording program

Substrate processing apparatus, substrate processing method, and computer readable storage medium storing substrate processing program

DEFECT INSPECTING METHOD, DEFECT INSPECTING APPARATUS, AND STORAGE MEDIUM STORING DEFECT INSPECTION PROGRAM

DEFECT CLASSIFICATION METHOD, COMPUTER STORAGE MEDIUM, AND DEFECT CLASSIFICATION APPARATUS

SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION SYSTEM AND STORAGE MEDIUM

METHOD OF DETECTING EXTRANEOUS MATTER ON HEAT PROCESSING PLATE, HEAT PROCESSING APPARATUS, PROGRAM, AND COMPUTER-READABLE RECORDING MEDIUM WITH PROGRAM RECORDED THEREON

Process monitoring device and process monitoring method in semiconductor manufacturing apparatus and semiconductor manufacturing apparatus

Setting method of exposure apparatus, substrate imaging apparatus and non-transitory computer-readable storage medium

Method for classifying defects, computer storage medium, and device for classifying defects