Is this you? Create Your Porfile
Avatar

Shuji Iwanaga

Tokyo Electron

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Shuji Iwanaga is active.

Explore More

Publication

Featured researches published by Shuji Iwanaga.

Archive | 2011

TEMPERATURE SETTING METHOD OF HEAT PROCESSING PLATE, TEMPERATURE SETTING APPARATUS OF HEAT PROCESSING PLATE, PROGRAM, AND COMPUTER-READABLE RECORDING MEDIUM RECORDING PROGRAM THEREON

Shuji Iwanaga; Nobuyuki Sata

Archive | 2004

Temperature setting method of heat treatment board, temperature setting device thereof, program and computer-readable recording medium for recording program

Shuji Iwanaga; Nobuyuki Sata; 修児 岩永; 信幸 左田

Archive | 2015

Substrate processing apparatus, substrate processing method, and computer readable storage medium storing substrate processing program

Shuhei Matsumoto; Shuji Iwanaga; Hiroshi Tomita; Kenji Nakamizo; Satoshi Morita

Archive | 2010

DEFECT INSPECTING METHOD, DEFECT INSPECTING APPARATUS, AND STORAGE MEDIUM STORING DEFECT INSPECTION PROGRAM

Shuji Iwanaga

Archive | 2009

DEFECT CLASSIFICATION METHOD, COMPUTER STORAGE MEDIUM, AND DEFECT CLASSIFICATION APPARATUS

Shuji Iwanaga

Archive | 2009

SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION SYSTEM AND STORAGE MEDIUM

Shuji Iwanaga; Kazuya Hisano

Archive | 2005

METHOD OF DETECTING EXTRANEOUS MATTER ON HEAT PROCESSING PLATE, HEAT PROCESSING APPARATUS, PROGRAM, AND COMPUTER-READABLE RECORDING MEDIUM WITH PROGRAM RECORDED THEREON

Kouji Okamura; Hiroshi Tomita; Shuji Iwanaga; Shinichiro Araki

Archive | 2013

Process monitoring device and process monitoring method in semiconductor manufacturing apparatus and semiconductor manufacturing apparatus

Yasutoshi Umehara; Motoi Okada; Shuji Iwanaga

Archive | 2012

Setting method of exposure apparatus, substrate imaging apparatus and non-transitory computer-readable storage medium

Shinobu Miyazaki; Hiroshi Tomita; Shuji Iwanaga

Archive | 2009

Method for classifying defects, computer storage medium, and device for classifying defects

Shuji Iwanaga; 修児 岩永

Explore More

Collaboration

Dive into the Shuji Iwanaga's collaboration.

Top Co-Authors
Avatar

Hiroshi Tomita

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Tadashi Nishiyama

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Izumi Hasegawa

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Kouji Okamura

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Nobuyuki Sata

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Shinichiro Araki

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Shinobu Miyazaki

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Akinori Miyahara

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Kanzou Katou

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Kazuya Hisano

Tokyo Electron

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge