Is this you? Create Your Porfile
Avatar

Shinichiro Araki

Tokyo Electron

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Shinichiro Araki is active.

Explore More

Publication

Featured researches published by Shinichiro Araki.

Archive | 1996

Semiconductor treatment system and method for exchanging and treating substrate

Shinichiro Araki

Archive | 1999

Conveying unit and substrate processing unit

Shinya Tanoue; Shinichiro Araki; Tatsuya Iwasaki; Eiichiro Kamada

Archive | 1999

Coating and developing apparatus

Shinichiro Araki; Shinko Matsumoto; Noriyuki Anai

Archive | 2008

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

Shinichiro Araki

Archive | 2001

Coating and developing method and apparatus therefor

Shinichiro Araki; Shinko Matsumoto; Noriyuki Anai

Archive | 2008

System for verifying applicability of new operation recipe to substrate processing apparatus

Shinichiro Araki

Archive | 2005

METHOD OF DETECTING EXTRANEOUS MATTER ON HEAT PROCESSING PLATE, HEAT PROCESSING APPARATUS, PROGRAM, AND COMPUTER-READABLE RECORDING MEDIUM WITH PROGRAM RECORDED THEREON

Kouji Okamura; Hiroshi Tomita; Shuji Iwanaga; Shinichiro Araki

Archive | 2001

Coating and developing method

Shinichiro Araki; Shinko Matsumoto; Noriyuki Anai

Archive | 2005

Method for detecting extraneous matter on thermal treatment plate, thermal treatment device, program, and computer readable recording medium containing the program

Kouji Okamura; Hiroshi Tomita; Shuji Iwanaga; Shinichiro Araki

Archive | 2013

Information processing apparatus, processing system, processing method, and program

Shinichiro Araki; Katsuhiko Matsuda; Kiminori Okada; Taichi Ito; Susumu Nakajima; Nobuhiro Horiuchi

Explore More

Collaboration

Dive into the Shinichiro Araki's collaboration.

Top Co-Authors
Avatar

Hiroshi Tomita

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Kouji Okamura

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Noriyuki Anai

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Shinko Matsumoto

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Shuji Iwanaga

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Katsuhiko Matsuda

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Kiminori Okada

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Nobuhiro Horiuchi

Kyocera

View shared research outputs
Top Co-Authors
Avatar

Susumu Nakajima

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Taichi Ito

Tokyo Electron

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge