Shunsuke Yokotsuka

Low loss and highly reliable polymer optical waveguides with perfluorinated dopant-free core

Polarization independent and low propagation loss of 0.03 dB/cm even at 1650 nm was obtained by the polymer optical waveguide with the dopant-free core made of purely perfluorinated amorphous polymer. High durability to humidity was also shown

Novel Polymer Dielectrics for Wafer Level High Density Interconnect

Properties and processability of a new class of thermosetting fluorinated polymer are described. This polymer possesses excellent electrical properties (low dielectric constant and low dielectric loss), optical properties (low absorption and low birefringence), mechanical properties, heat stability, and chemical durability due to its fluorinated rigid backbone and highly crosslinked structure. Both dry-etch and photosensitive formulations are discussed from the viewpoint of reliability and processing requirements for wafer level high density interconnect and packaging such as thin-film formation, adhesion, planarization, stacking and fine patterning capabilities.

Ultra-wide-band low loss and PDL 1/spl times/32 splitter polymer optical waveguide

We fabricated 1 /spl times/ 32 splitter device based on Si substrate using spin perfluorinated polymer. We could demonstrate 1 /spl times/ 32 splitter device of low loss and PDL in ultra-wide-band range (1.31 /spl mu/m/1.55/1.65 /spl mu/m).