Katsumi Suzuki
Fujitsu
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Publication
Featured researches published by Katsumi Suzuki.
international interconnect technology conference | 2003
Masanobu Ikeda; Junya Nakahira; Yoshihisa Iba; Hideki Kitada; Nobuyuki Nishikawa; Motoshu Miyajima; Shun-ichi Fukuyama; Noriyoshi Shimizu; Kazuto Ikeda; Takayuki Ohba; Iwao Sugiura; Katsumi Suzuki; Yoshihiro Nakata; Shuichi Doi; Naoki Awaji; Ei Yano
A highly reliable nano-clustering silica (NCS) with low dielectric constant(k<2.3) and high elastic modulus (E=10 Gpa) for copper damascene process has been developed by controlling the size and distribution of pores in the NCS precursor. Using this material in a process compatible with the 90 nm technology node, we successfully demonstrated Cu wiring in NCS dielectrics.
Archive | 2001
Yoshihiro Nakata; Shun-ichi Fukuyama; Katsumi Suzuki; Ei Yano; Tamotsu Owada; Iwao Sugiura
Archive | 2004
Yoshihiro Nakata; Katsumi Suzuki; Iwao Sugiura; Ei Yano
Archive | 2002
Yoshihiro Nakata; Katsumi Suzuki; Iwao Sugiura; Ei Yano
Archive | 2003
Akira Nakashima; Miki Egami; Michio Komatsu; Yoshihiro Nakata; Ei Yano; Katsumi Suzuki
Archive | 2001
Yoshihiro Nakata; Shun-ichi Fukuyama; Katsumi Suzuki; Ei Yano; Tamotsu Owada; Iwao Sugiura
Archive | 2003
Akira Nakashima; Miki Egami; Michio Komatsu; Yoshihiro Nakata; Ei Yano; Katsumi Suzuki
Archive | 2002
Yoshihiro Nakata; Katsumi Suzuki; Iwao Sugiura; Ei Yano
Archive | 2001
Shun-ichi Kawasaki Fukuyama; Yoshihiro Kawasaki Nakata; Tamotsu Owada; Iwao Sugiura; Katsumi Suzuki; Ei Kawasaki Yano
Archive | 2001
Yoshihiro Nakata; Katsumi Suzuki; Iwao Sugiura; Ei Yano
