Shunya Inoue
Tokyo Institute of Technology
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Publication
Featured researches published by Shunya Inoue.
Japanese Journal of Applied Physics | 2014
Shunya Inoue; Junichi Kashino; Akihiro Matsutani; Hideo Ohtsuki; Takahiro Miyashita; Fumio Koyama
We report on the design and fabrication of a highly angular dependent high contrast grating (HCG) mirror. The modeling and experiment on amorphous-Si/SiO2 HCG clearly show the large angular dependence of reflectivity, which enables single transverse-mode operations of large-area VCSELs. We fabricate 980 nm VCSELs with the angular dependent HCG functioning as a spatial frequency filter. We obtained the single transverse mode operation of the fabricated device in contrast to conventional VCSELs with semiconductor multilayer mirrors
IEEE Photonics Technology Letters | 2013
Masanori Nakahama; Hayato Sano; Shunya Inoue; Takahiro Sakaguchi; Akihiro Matsutani; Fumio Koyama
We demonstrate a micromachined tunable vertical-cavity surface-emitting laser with a monolithically formed anti-reflection (AR) layer for highly efficient electro-thermal wavelength tuning. The AR layer is formed by the lateral oxidation of an aluminum-rich AlGaAs layer and no extra process is needed. We fabricated a micromachined GaAs vertical-cavity surface-emitting laser and measured its wavelength tuning characteristic. The measurement result shows that the oxide layer functions as an AR layer for linear and efficient tuning characteristics. A large negative temperature dependence of wavelength from -0.24 to -2.0 nm/K was demonstrated using a thermally actuated cantilever for efficient electro-thermal wavelength tuning. An electro-thermal tuning efficiency of -2.3 to -4.8 nm/mW was obtained.
Japanese Journal of Applied Physics | 2014
Masanori Nakahama; Hayato Sano; Shunya Inoue; Takahiro Sakaguchi; Akihiro Matsutani; Moustafa Ahmed; Ahmed Bakry; Fumio Koyama
We demonstrate the wavelength tuning and the control of its temperature dependence in 850 nm GaAs vertical cavity surface emitting lasers (VCSELs) using a thermally and electrostatically actuated cantilever structure. The temperature dependence can be controlled from +0.035 to −0.14 nm/K by changing the length of a micromachined cantilever, which can be electrostatically actuated for wavelength tuning. Continuous wavelength tuning over 36 nm was obtained keeping almost constant temperature dependence. The result indicates a possibility of realizing widely-tunable VCSELs with engineered temperature dependence.
microoptics conference | 2015
Shunya Inoue; Akihiro Matsutani; H. Ohtsuki; T. Miyashita; Fumio Koyama
We demonstrate the dual beam emission from single-mode vertical cavity surface emitting lasers (VCSELs) with high-index contrast sub-wavelength grating (HCG) as a top mirror. The modeling and experiment on amorphous-Si/SiO2 HCG clearly shows the large angular dependence of reflectivity, which enables the dual beam emission with a large tilt angle. We fabricated VCSELs with the angular dependent HCG. We observed dual beams with 45° tilted directions which are engineered by the angular dependence of HCG.
conference on lasers and electro optics | 2013
Masanori Nakahama; Hayato Sano; Shunya Inoue; Akihiro Matsutani; Takahiro Sakaguchi; Fumio Koyama
We report on an electro-thermally tunable 850nm VCSEL, exhibiting a large negative wavelength drift of 2.0nm/K. Continuous and linear wavelength tuning of 25 nm was obtained with heating power of 9.4 mW.
Proceedings of SPIE | 2013
Masanori Nakahama; Hayato Sano; Shunya Inoue; Akihiro Matsutani; Takahiro Sakaguchi; Fumio Koyama
We demonstrate a giant wavelength-temperature dependence of wavelength of a micromachined 850nm VCSEL with a thermally actuated metal/semiconductor cantilever mirror. The modeling shows a possibility of giant temperature dependence of wavelength of several nm/K, which is determined by cantilever length and metal thickness. The fabricated 850nm VCSEL exhibits a temperature dependence of -1.6 nm/K, and a wavelength tuning of 35 nm in 850 nm band was obtained by changing the device temperature by 12K. In addition, electro-thermal tuning was demonstrated using integrated micro heater. Continuous wavelength shift of 15 nm was obtained with heating power of 40 mW.
ieee photonics conference | 2013
Junichi Kashino; Shunya Inoue; Akihiro Matsutani; Hideo Ohtsuki; Takahiro Miyashita; Fumio Koyama
The Japan Society of Applied Physics | 2018
Shunya Inoue; Toshihiro Asahi; Shun Nishimura; Masanori Nakahama; Akihiro Matsutani; Takahiro Sakaguchi; Fumio Koyama
Japanese Journal of Applied Physics | 2018
Shunya Inoue; Shun Nishimura; Masanori Nakahama; Akihiro Matsutani; Takahiro Sakaguchi; Fumio Koyama
conference on lasers and electro optics | 2017
Masanori Nakahama; Shunya Inoue; Shun Nishimura; Akihiro Matsutani; Takahiro Sakaguchi; Fumio Koyama