Søren Dohn

Cantilever-like micromechanical sensors

The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known technology for label-free sensing which holds promise as a technique for cheap, portable, sensitive and highly parallel analysis systems. The research in sensor realization as well as sensor applications has increased significantly over the past 10 years. In this review we will present the basic modes of operation in cantilever-like micromechanical sensors and discuss optical and electrical means for signal transduction. The fundamental processes for realizing miniaturized cantilevers are described with focus on silicon- and polymer-based technologies. Examples of recent sensor applications are given covering such diverse fields as drug discovery, food diagnostics, material characterizations and explosives detection.

Enhanced functionality of cantilever based mass sensors using higher modes

By positioning a single gold particle at different locations along the length axis on a cantilever based mass sensor, we have investigated the effect of mass position on the mass responsivity and compared the results to simulations. A significant improvement in quality factor and responsivity was achieved by operating the cantilever in the fourth bending mode thereby increasing the intrinsic sensitivity. It is shown that the use of higher bending modes grants a spatial resolution and thereby enhances the functionality of the cantilever based mass sensor.

Mass and position determination of attached particles on cantilever based mass sensors

An analytical expression relating mass and position of a particle attached on a cantilever to the resulting change in cantilever resonant frequency is derived. Theoretically, the position and mass of the attached particle can be deduced by combining measured resonant frequencies of several bending modes. This finding is verified experimentally using a microscale cantilever with and without an attached gold bead. The resonant frequencies of several bending modes are measured as a function of the bead position. The bead mass and position calculated from the measured resonant frequencies are in good agreement with the expected mass and the position measured.

Real-time particle mass spectrometry based on resonant micro strings.

Micro- and nanomechanical resonators are widely being used as mass sensors due to their unprecedented mass sensitivity. We present a simple closed-form expression which allows a fast and quantitative calculation of the position and mass of individual particles placed on a micro or nano string by measuring the resonant frequency shifts of the first two bending modes. The method has been tested by detecting the mass spectrum of micro particles placed on a micro string. This method enables real-time mass spectrometry necessary for applications such as personal monitoring devices for the assessment of the exposure dose of airborne nanoparticles.

Constructing, connecting and soldering nanostructures by environmental electron beam deposition

Highly conductive nanoscale deposits with solid gold cores can be made by electron beam deposition in an environmental scanning electron microscope (ESEM), suggesting the method to be used for constructing, connecting and soldering nanostructures. This paper presents a feasibility study for such applications. We identify several issues related to contamination and unwanted deposition, relevant for deposition in both vacuum (EBD) and environmental conditions (EEBD). We study relations between scan rate, deposition rate, angle and line width for three-dimensional structures. Furthermore, we measure the conductivity of deposits containing gold cores, and find these structures to be highly conductive, approaching the conductivity of solid gold and capable of carrying high current densities. Finally, we study the use of the technique for soldering nanostructures such as carbon nanotubes. Based on the presented results we are able to estimate limits for the applicability of the method for the various applications, but also demonstrate that it is a versatile and powerful tool for nanotechnology within these limits.

Position and mass determination of multiple particles using cantilever based mass sensors

Resonant microcantilevers are highly sensitive to added masses and have the potential to be used as mass-spectrometers. However, making the detection of individual added masses quantitative requires the position determination for each added mass. We derive expressions relating the position and mass of several added particles to the resonant frequencies of a cantilever, and an identification procedure valid for particles with different masses is proposed. The identification procedure is tested by calculating positions and mass of multiple microparticles with similar mass positioned on individual microcantilevers. Excellent agreement is observed between calculated and measured positions and calculated and theoretical masses.

Ultrasensitive string-based temperature sensors

Resonant strings are a promising concept for ultra sensitive temperature detection. We present an analytical model for the sensitivity with which we optimize the temperature response of resonant strings by varying geometry and material. The temperature sensitivity of silicon nitride and aluminum microstrings was measured. The relative change in resonant frequency per temperature change of −1.74±0.04%/°C of the aluminum strings is more than one order of magnitude higher than of the silicon nitride strings and of comparable state-of-the-art AuPd strings.

Cantilever based mass sensor with hard contact readout

We present a method for microcantilever resonant frequency detection. We measure the direct current from an intermittent contact once every vibration cycle between the conducting cantilever and a counterelectrode at a low bias voltage with respect to the cantilever, while the excitation frequency and amplitude are varied. The result is an almost “digital” detection of the resonant frequency. A relative frequency resolution Δf∕f of 1∕80000 with high signal to noise ratio in ambient conditions is demonstrated. The detection method can be applied to portable sensor systems with very high frequency nanoelectromechanical cantilevers using simple off-chip electronics.

Drift study of SU8 cantilevers in liquid and gaseous environments

We present a study of the drift, in terms of cantilever deflections without probe/target interactions, of polymeric SU8 cantilevers. The drift is measured in PBS buffer (pH 7.4) and under vacuum (1mbar) conditions. We see that the cantilevers display a large drift in both environments. We believe this is because the polymer matrix absorbs liquid in one situation whereas it is being degassed in the other. An inhomogeneous expansion/contraction of the cantilever is seen because one surface of the cantilever may still have remains of the release layer from the fabrication. To further study the effect, we coat the cantilevers with a hydrophobic coating, perfluorodecyltrichlorosilane (FDTS). Fully encapsulating the SU8 cantilever greatly reduces the drift in liquid whereas a less significant change is seen in vacuum.

Surface Functionalization of Epoxy‐Resist‐ Based Microcantilevers with Iron Oxide Nanocrystals

Microcantilevers are miniaturized mechanical sensors which pro- vide a specifi c, real-time and label-free detection of bio/molecules and chemical reactions in different environments with a fast response time and low reagent consumption. The typical trans-duction mechanism is based on the cantilever defl ection due to selective physical and chemical processes occurring on one side of the probe surface.