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Stephen K. Loh

IBM

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Publication

Featured researches published by Stephen K. Loh.

Archive | 1997

Method of forming a dopant outdiffusion control structure including selectively grown silicon nitride in a trench capacitor of a DRAM cell

Stephen K. Loh; Christine Dehm; Christopher Parks

Archive | 1997

Titanium polycide stabilization with a porous barrier

Atul C. Ajmera; Christine Dehm; Anthony G. Domenicucci; George G. Gifford; Stephen K. Loh; Christopher Parks; Viraji Y Sardesai

Archive | 1997

Apparatus and method for minimizing diffusion in stacked capacitors formed on silicon plugs

Christine Dehm; Stephen K. Loh; Carlos Mazuré

Archive | 1998

Method and structure for surface state passivation to improve yield and reliability of integrated circuit structures

Stephen K. Loh

Archive | 2004

Detection of residual liner materials after polishing in damascene process

Ronald G. Filippi; Roy C. Iggulden; Edward W. Kiewra; Stephen K. Loh; Ping-Chuan Wang

Archive | 1998

Method of forming polysilicon capacitor electrode

Christine Dehm; Stephen K. Loh; Carlos Mazuré

Archive | 1998

Method for minimizing lateral and vertical dopant diffusion in gate structures

Christine Dehm; Stephen K. Loh; Christopher Parks

Archive | 2005

System and method for determining line widths of free-standing structures resulting from a semiconductor manufacturing process

Stephen M. Lucarini; Karl W. Barth; Stephen K. Loh

Archive | 1998

Verfahren zum Minimieren von vertikaler und lateraler Dotierstoffdiffusion in Gatterstrukturen Method for minimizing the vertical and lateral dopant diffusion in gate structures

Christine Dehm; Stephen K. Loh; Christopher Parks

Archive | 1998

Process for facilitating passivation of surface states in a device in device fabrication

Johann Alsmeier; Stephen K. Loh; Donna Rizzone Cote; Paul C. Parries; Max G. Levy; George G. Gifford; Frank Prein

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Christopher Parks

IBM

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Christine Dehm

Infineon Technologies

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Christine Dehm

Infineon Technologies

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George G. Gifford

IBM

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Anthony G. Domenicucci

IBM

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Atul C. Ajmera

IBM

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Viraji Y Sardesai

IBM

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Carlos Mazuré

IBM

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Carlos Mazure

Siemens

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Donna Rizzone Cote

IBM

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