Steven R. Rogers
Applied Materials
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Publication
Featured researches published by Steven R. Rogers.
Integrated Circuit Metrology, Inspection, and Process Control VIII | 1994
Alon Litman; Asher Pearl; Steven R. Rogers
The characteristics of BSE emission at low beam energies (0.5 to 5 kV) are discussed with reference to signal intensity, topographic contrast, material contrast, charging phenomena, and metrology issues. Experimental results are presented for a back-scattered electron (BSE) detector that has been developed for viewing deep trenches and high-aspect contact holes in the CD-SEM metrology applications.
Archive | 1995
Alon Litman; Alexander Goldenstein; Steven R. Rogers
Archive | 2004
Rainer Knippelmeyer; Oliver Kienzle; Thomas Kemen; Heiko Mueller; Stephan Uhlemann; Maximillian Haider; Antonio Casares; Steven R. Rogers
Archive | 2004
Rainer Knippelmeyer; Oliver Kienzle; Thomas Kemen; Heiko Mueller; Stephan Uhlemann; Maximilian Haider; Antonio Casares; Steven R. Rogers
Archive | 1995
Alon Litman; Alexander Goldenstein; Steven R. Rogers
Archive | 2006
Steven R. Rogers; Nissim Elmaliach; Emanuel Elyasef; Alon Litman; Ron Naftali
Archive | 1995
Alexander Goldenstein; Alon Litman; Steven R. Rogers; ゴールデンステイン アレクサンダー; リットマン アロン; アール．ロジャース スティーブン
Archive | 2012
Avner Libman; Eyal Torres; Amichai Ron; Steven R. Rogers; Daniella Atzmony; Eliezer Gelbart
Archive | 2007
Emanuel Elyasaf; Steven R. Rogers
Archive | 2012
Amichai Ron; Elliad Silcoff; Ginat Rachel Muginstein; Steven R. Rogers; Pinchas Einziger
