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Publication
Featured researches published by Susanne Westenhöfer.
Micromachining technology for micro-optics and nano-optics. Conference | 2006
Markus Rossi; Hartmut Rudmann; Susanne Westenhöfer; Martin Salt; Rainer Pelzer
UV-NanoImprint Lithography (NIL) is a fast and low cost method, which becomes an increasingly important instrument for fabrication of μ-TAS and telecommunication devices. The key elements of UV-NIL are transparent molds and low viscosity resists. Two different transparent mold materials, allowing UV curing through the stamp, were developed: rigid quartz or flexible PDMS. Typical resist viscosities are in a range of <100mPas, ensuring fast and successful filling of the stamp cavities. UV-curing is carried out at a wavelength of 350-450 nm.
Archive | 2008
Hartmut Rudmann; Stephan Heimgartner; Susanne Westenhöfer; Markus Rossi
Archive | 2006
Hartmut Rudmann; Stephan Heimgartner; Susanne Westenhöfer; Markus Rossi
Archive | 2014
Hartmut Rudmann; Simon Gubser; Susanne Westenhöfer; Stephan Heimgartner; Jens Geiger; Sonja Hanselmann; Christoph Friese; Xu Yi; Thng Chong Kim; John A. Vidallon; Ji Wang; Qi Chuan Yu; Kam Wah Leong
Archive | 2009
Hartmut Rudmann; Susanne Westenhöfer; Diane Morgan
Archive | 2007
Hartmut Rudmann; Stephan Heimgartner; Susanne Westenhöfer; Markus Rossi
Archive | 2006
Hartmut Rudmann; Stephan Heimgartner; Susanne Westenhöfer; Markus Rossi
Archive | 2007
Hartmut Rudmann; Stephan Heimgartner; Susanne Westenhöfer; Markus Rossi
Archive | 2012
Hartmut Rudmann; Susanne Westenhöfer; Bojan Tesanovic
Archive | 2014
Hartmut Rudmann; Susanne Westenhöfer; Simon Gubser
