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Susumu Goto

Canon Inc.

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Publication

Featured researches published by Susumu Goto.

Archive | 1997

Electron beam exposure apparatus and method of controlling same

Masato Muraki; Susumu Goto

Archive | 1997

Position detection apparatus, electron beam exposure apparatus, and methods associated with them

Masato Muraki; Susumu Goto

Archive | 1996

Electron beam exposure device and exposure method thereof

Susumu Goto; Masato Muraki; 進 後藤; 真人 村木

Archive | 1987

Alignment system using an electron beam

Susumu Goto; Yuichi Kumabe; Masahiko Okunuki

Archive | 2003

Electron beam exposure apparatus and electron beam processing apparatus

Shinichi Hamaguchi; Susumu Goto; Osamu Kamimura; Yasunari Sohda

Archive | 2009

CHARGED-PARTICLE BEAM LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD

Susumu Goto

Archive | 2002

Electron beam exposure apparatus, reduction projection system, and device manufacturing method

Susumu Goto

Archive | 2003

Projection apparatus for projecting a pattern formed on a mask onto a substrate and a control method for a projection apparatus

Susumu Goto

Archive | 1998

Electron beam projection exposure apparatus

Susumu Goto

Archive | 1993

X-ray transfer apparatus and method

Susumu Goto; Takuo Kariya; Yasuo Kawai; Masahiko Okunuki; 卓夫 刈谷; 昌彦 奥貫; 進 後藤; 靖雄 河合

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Masahiko Okunuki

Canon Inc.

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Masato Muraki

Canon Inc.

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Yuichi Kumabe

Canon Inc.

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Yasuo Kawai

Canon Inc.

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Osamu Kamimura

Canon Inc.

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Shinichi Hamaguchi

Canon Inc.

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Yasunari Sohda

Canon Inc.

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