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Yasunari Sohda

Canon Inc.

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Publication

Featured researches published by Yasunari Sohda.

Archive | 2004

Method of charged particle beam lithography and equipment for charged particle beam lithography

Sayaka Tanimoto; Yasunari Sohda; Yoshinori Nakayama; Osamu Kamimura; Haruo Yoda; Masaki Hosoda

Archive | 2002

Electron beam exposure method, electron beam exposure apparatus and device manufacturing method using the same

Hiroya Ohta; Yasunari Sohda; Norio Saitou; Haruo Yoda; Yoshikiyo Yui; Shin apos Ichi Hashimoto

Archive | 2005

Measurement method of electron beam current, electron beam writing system and electron beam detector

Makoto Sakakibara; Yoshinori Nakayama; Hiroya Ohta; Yasunari Sohda; Noriyuki Tanaka; Yasuhiro Someda

Archive | 2002

Charged particle beam exposure apparatus, device manufacturing method, and charged particle beam applied apparatus

Masato Muraki; Yasunari Sohda; Shinichi Hashimoto

Archive | 2003

Electron beam exposure apparatus and electron beam processing apparatus

Shinichi Hamaguchi; Susumu Goto; Osamu Kamimura; Yasunari Sohda

Archive | 2006

Method and apparatus for applying charged particle beam

Sayaka Tanimoto; Yasunari Sohda; Yasuhiro Someda; Masaki Hosoda

Archive | 2004

Electron beam writing equipment and electron beam writing method

Yasunari Sohda; Hiroya Ohta; Osamu Kamimura; Susumu Gotoh

Archive | 2006

Electron beam writing system and electron beam writing method

Yoshinori Nakayama; Hiroya Ohta; Makoto Sakakibara; Yasunari Sohda; Masaki Hosoda

Archive | 2003

Electron beam exposure equipment and electron beam exposure method

Yasunari Sohda; Osamu Kamimura; Hiroya Ohta; Susumu Gotoh

Archive | 2004

Method and equipment for charged particle beam lithography

Sayaka Tanimoto; Yasunari Sohda; Yoshinori Nakayama; Osamu Kamimura; Haruo Yoda; Masaki Hosoda

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Osamu Kamimura

Canon Inc.

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Hiroya Ohta

Canon Inc.

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Yoshinori Nakayama

Canon Inc.

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Masaki Hosoda

Canon Inc.

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Haruo Yoda

Canon Inc.

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Sayaka Tanimoto

Canon Inc.

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Makoto Sakakibara

Canon Inc.

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Masato Muraki

Canon Inc.

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Susumu Gotoh

Canon Inc.

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Yasuhiro Someda

Canon Inc.

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