Suzuki Yasumichi | Researchain

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Publication

Featured researches published by Suzuki Yasumichi.

Archive | 1989

SPUTTER-ETCHING DEVICE

Suzuki Yasumichi; Saito Yutaka; Sasabe Shunji; Nakajima Kazuhiro

Archive | 1990

Method for controlling wafer temperature

Saito Yutaka; Suzuki Yasumichi

Archive | 1990

Heat treatment device system

Suzuki Yasumichi; Saito Yutaka

Archive | 1989

THIN FILM FORMATION, APPARATUS THEREFOR, AND SEMICONDUCTOR ELEMENT

Suzuki Yasumichi; Saito Yutaka; Sasabe Shunji; Nakajima Kazuhiro

Archive | 1987

SPUTTERING PROCESS AND DEVICE THEREOF

Sano Hidezo; Saito Yutaka; Suzuki Yasumichi; Aiuchi Susumu

Archive | 1998

SEMICONDUCTOR PLANT AND PRODUCTION METHOD OF SEMICONDUCTOR

Kobayashi Hide; Suzuki Yasumichi; Sakata Masao

Archive | 1992

METHOD AND DEVICE FOR PLASMA TREATMENT USING MICROWAVE

Suzuki Yasumichi; Saito Yutaka

Archive | 1990

THIN FILM FORMING METHOD AND DEVICE

Suzuki Yasumichi; Saito Yutaka; Sasabe Shunji; Nakajima Kazuhiro

Archive | 1987

DEVICE FOR HIGH-FREQUENCY SPUTTERING

Saito Yutaka; Suzuki Yasumichi; Aiuchi Susumu

Archive | 1987

PLANAR SPUTTERING METHOD

Saito Yutaka; Suzuki Yasumichi

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Collaboration

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Aiuchi Susumu

Hitachi

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Shimamura Hideaki

Hitachi

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Sakata Masao

Hitachi

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Kamei Tsuneaki

Hitachi

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Kobayashi Shigeru

Hitachi

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Saito Hiroshi

Hitachi

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Tateishi Hideki

Hitachi

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