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Syuhei Kurokawa

Ube Industries

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ECS Transactions | 2014

Invited) Approach to High Efficient CMP for Power Device Substrates

Syuhei Kurokawa; Toshiro Doi; Chengwu W. Wang; Yasuhisa Sano; Hideo Aida; Koki Oyama; Kunimitsu Takahashi

Archive | 2011

Ceramic composite for photoconversion, and method for manufacture thereof

Dai Inamori; 太 稲森; Takafumi Kawano; 河野 孝史; Toshiro Doi; 土肥 俊郎; Syuhei Kurokawa; 周平 黒河

Archive | 2010

POLISHING SLURRY FOR SILICON CARBIDE AND POLISHING METHOD THEREFOR

Toshiro Doi; Syuhei Kurokawa; Osamu Ohnishi; Tadashi Hasegawa; Yasuhiro Kawase; Yasuhide Yamaguchi

The Proceedings of Conference of Kyushu Branch | 2017

Observational investigation of surface texture in soft type CMP pad: ―Evaluation of effect on pad surface texture by the high-pressure jet―@@@―高圧ジェットのパッド表面性状への影響評価―

Masashi Kitamura; Atsunori Watanabe; Syuhei Kurokawa; Terutake Hayashi; Hirokuni Hiyama; Yutaka Wada; Chikako Takatoh

The Proceedings of Conference of Kyushu Branch | 2017

Polishing of Quartz grass by Using Colloidal CeO2: ～Survey of Substrate Surface by AFM～@@@～AFMを用いた基板表面の調査～

Syuhei Kurokawa; Terutake Hayashi; Takaaki Toyama

The Proceedings of Conference of Kyushu Branch | 2017

In-process Detection of End mill Tool Wear: －Result of wear detection on ball end mill－@@@―ボールエンドミルにおける摩耗検出結果について―

Tetsuya Torii; Amine Gouarir; Mitsuaki Murata; Syuhei Kurokawa; Yoji Matsukawa; Terutake Hayashi

The Proceedings of Mechanical Engineering Congress, Japan | 2016

Study on nanoparticle sizing measurement method using fluorescence probe: ―Measurement of viscosity and the temperature of the dispersion medium―@@@―分散媒の粘性と温度の測定―

Toshiki Seri; Terutake Hayashi; Syuhei Kurokawa

The Proceedings of Mechanical Engineering Congress, Japan | 2016

Development of plasma fusion CMP for hard to process materials: - Investigation of the surface oxidative reaction in the GaN substrate -@@@―GaN 基板における表面酸化反応の調査―

Naoki Yamazaki; Toshiro Doi; Hideo Aida; Seong-Woo Kim; Koki Oyama; Yasuhisa Sano; Syuhei Kurokawa

The Proceedings of Manufacturing Systems Division Conference | 2016

A novel laser surface processing technique for additive layer manufacturing

Terutake Hayashi; Hideaki Yokoo; Syuhei Kurokawa; Keigo Matsunaga; Wang chengwu; Youji Matsukawa

The Proceedings of Conference of Kyushu Branch | 2016

A-05 Study on nanoparticle sizing measurement method using fluorescence probe

Toshiki Seri; Terutake Hayashi; Syuhei Kurokawa

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Toshiro Doi

Kyushu University

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Osamu Ohnishi

University of Miyazaki

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Yoji Matsukawa

Kyushu University

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Terutake Hayashi

Kyushu University

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Michio Uneda

Kanazawa Institute of Technology

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Yoji Umezaki

Kyushu University

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Keiji Miyachi

Kyushu University

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Mitsuaki Murata

Kyushu University

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Hirokuni Hiyama

Ebara Corporation

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Tadashi Hasegawa

Kyushu University

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