Tadaaki Yako
Sumitomo Chemical
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Publication
Featured researches published by Tadaaki Yako.
Applied Surface Science | 2001
Kozo Tanaka; Hiroyuki Yanashima; Tadaaki Yako; Kunimasa Kamio; Kazumi Sugai; Shunji Kishida
To understand the nucleation mechanisms of aluminum film during chemical vapor deposition (CVD), the reactions of dimethylaluminum hydride (DMAH) with oxidized TiN and Si surfaces were studied by X-ray photoelectron spectroscopy (XPS) and time-of-flight secondary ion mass spectrometry (TOF-SIMS). It was observed that DMAH exposure reduced the native oxide on the TiN surface, resulting in a clean TiN surface. The reduction of the native oxide and the deposition of Al on the TiN surface were enhanced with increasing DMAH dose. In contrast with the reaction on the TiN surface, no reduction of native oxide by DMAH exposure was observed on the Si surface except at the uppermost surface level analyzed by TOF-SIMS. The amount of Al deposited on the oxidized Si surface was less than that on the oxidized TiN surface under the same experimental conditions and was largely independent of the amount of DMAH dose over the studied range. The reduction of native oxide and the appearance of a clean TiN surface are thought to be important in accounting for the nucleation mechanism and the improved surface morphology of Al film deposited on TiN surfaces using the CVD process.
Japanese Journal of Applied Physics | 1995
Kazumi Sugai; Hidekazu Okabayashi; Akiko Kobayashi; Tadaaki Yako; Shunji Kishida
A nondestructive, noncontact monitoring method has been developed for Al chemical vapor deposition (CVD). This monitoring method involves irradiating He-Ne laser light on the substrate surface and detecting the reflected light intensity. The intensity changes with deposition time corresponded to the following stage of Al island formation, island coalescence, continuous smooth film formation, and surface roughening. The effectiveness of this method was demonstrated by applying it to Al growth on both in situ sputtered Ti and SiO2 pretreated with tetrakisdimethylamino-titanium for nucleation enhancement.
Archive | 1988
Hidekimi Kadokura; Kenichi Sawara; Tadaaki Yako
Archive | 1995
Hidekazu Okabayashi; Kazumi Sugai; Tadaaki Yako; 忠明 八子; 秀和 岡林; 和己 菅井
Archive | 1994
Tadaaki Yako; Yasuo Oga
Archive | 1974
Atsuro Matsui; Hidekimi Kadokura; Tadaaki Yako; Hiroshi Umezaki; Kazuo Iida
Archive | 1990
Kenichi Sawara; Hidekimi Kadokura; Tadaaki Yako
Archive | 1994
Yasuo Oga; Tadaaki Yako
Electronics and Communications in Japan Part Ii-electronics | 1995
Akiko Kobayashi; Atsushi Sekiguchi; Osamu Okada; Naokichi Hosokawa; Kazumi Sugai; Shyunji Kishida; Hidekazu Okabayashi; Tsutomu Shinzawa; Tadaaki Yako; Hidekimi Kadokura
Electronics and Communications in Japan Part Ii-electronics | 1996
Tsutomu Shinzawa; Kazumi Sugai; Yoshihiro Hayashi; Tsutomu Nakajima; Shunji Kishida; Hidekazu Okabayashi; Kinji Tsunenari; Yukinobu Murao; Akiko Kobayashi; Tadaaki Yako