Tadashi Ikejiri
Nissin Electric
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Publication
Featured researches published by Tadashi Ikejiri.
ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 | 2006
Shigeki Sakai; Masayasu Tanjyo; Nariaki Hamamoto; Sei Umisedo; Tomoaki Kobayashi; Takatoshi Yamashita; Takao Matsumoto; Tadashi Ikejiri; Kohei Tanaka; Yuji Koga; Satoru Yuasa; Masao Naito; Nobuo Nagai
A new medium current ion implanter has been developed based on the EXCEED3000, which is highly reliable and widely used in 300mm fabs. The ion implanter now has to be designed so that it can precisely measure and control beam characteristics. For example beam angles have to be controlled in halo implantation because high tilt angle implantation is done according to the device geometric structure. Not only horizontal beam profile system but also vertical beam profile system are implemented in EXCEED3000AH‐G3 for the precise implantation control.
Archive | 2010
Tadashi Ikejiri; Tetsuya Igo; Takatoshi Yamashita
Archive | 2008
Takatoshi Yamashita; Tadashi Ikejiri; Keiko Kuzawa; Hideyuki Fujiwara
Archive | 2006
Tadashi Ikejiri; Toshiaki Kinoyama; Kanichirou Ogata; Shigehisa Tamura; Hideyuki Tanaka; Kohei Tanaka; Takatoshi Yamashita; 敢一郎 尾形; 貴敏 山下; 俊昭 木ノ山; 忠司 池尻; 浩 田中; 秀之 田中; 茂久 田村
Archive | 2009
Takatoshi Yamashita; Tadashi Ikejiri
Archive | 2007
Kiyoshi Umisedo; Shigeaki Hamamoto; Tadashi Ikejiri; Kohei Tanaka
Archive | 2009
Tetsuya Igo; Tadashi Ikejiri; Takatoshi Yamashita
Archive | 2001
Shigeki Sakai; Tadashi Ikejiri
Archive | 2009
Tetsuya Igo; Takatoshi Yamashita; Tadashi Ikejiri
Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on | 2002
Nariaki Hamamoto; Shigeki Sakai; Tadashi Ikejiri; Masayasu Tanjyo
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National Institute of Advanced Industrial Science and Technology
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