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Takahiro Kida

East Tennessee State University

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Publication

Featured researches published by Takahiro Kida.

Archive | 1997

A method of manufacturing a bonded wafer

Tatsuo Ito; Masami Nakano; Yasuaki Nakazato; Atsuo Uchiyama; Takahiro Kida; Tokio Takei; Katsuo Yoshizawa; Masao Fukami

Archive | 2009

Wafer polishing method and double-side polishing apparatus

Daisuke Furukawa; Kazumasa Asai; Takahiro Kida; Tadao Tanaka

Archive | 2000

Wafer polishing method and wafer polishing device

Takashi Nihonmatsu; Takahiro Kida; Tadao Tanaka

Archive | 2000

Method for polishing a work and an apparatus for polishing a work

Masao Kodaira; Mikio Nakamura; Takahiro Kida

Archive | 2005

Process for producing abrasive, abrasive produced by the same, and process for producing silicon wafer

Toshihiko Imai; Takahiro Kida; Mikio Nakamura; Masaaki Oshima; Tomohito Takano; 三喜男 中村; 利彦 今井; 正昭 大嶋; 隆広 木田; 智史 高野

Archive | 1999

Method for polishing thin plate and plate for holding thin plate

Mikio Nakamura; Takahiro Kida

Archive | 2014

Double-side polishing apparatus

Daisuke Furukawa; Kazumasa Asai; Takahiro Kida; Tadao Tanaka

Archive | 2005

Method for Producing Polishing Agent, Polishing Agent Produced Thereby and Method for Producing Silicon Wafer

Mikio Nakamura; Takahiro Kida; Tomofumi Takano; Toshihiko Imai; Masaaki Ohshima

Archive | 2009

Process for producing abrasive and process for producing silicon wafer

Mikio Nakamura; Takahiro Kida; Tomohito Takano; Toshihiko Imai; Masaaki Oshima

Archive | 2005

Process for producing abrasive material, abrasive material produced by the same, and process for producing silicon wafer

Mikio Nakamura; Takahiro Kida; Tomofumi Takano; Toshihiko Shin-Etsu Handotai Co. Ltd. Imai; Masaaki Ohshima

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Mikio Nakamura

East Tennessee State University

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Tadao Tanaka

East Tennessee State University

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Toshihiko Imai

East Tennessee State University

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Daisuke Furukawa

East Tennessee State University

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Kazumasa Asai

East Tennessee State University

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Masaaki Ohshima

East Tennessee State University

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Tomofumi Takano

East Tennessee State University

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Atsuo Uchiyama

East Tennessee State University

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Katsuo Yoshizawa

East Tennessee State University

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Masami Nakano

East Tennessee State University

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