Takamitsu Otsuka

Rare-earth plasma extreme ultraviolet sources at 6.5–6.7 nm

We have demonstrated a laser-produced plasma extreme ultraviolet source operating in the 6.5–6.7 nm region based on rare-earth targets of Gd and Tb coupled with a Mo/B4C multilayer mirror. Multiply charged ions produce strong resonance emission lines, which combine to yield an intense unresolved transition array. The spectra of these resonant lines around 6.7 nm (in-band: 6.7 nm ±1%) suggest that the in-band emission increases with increased plasma volume by suppressing the plasma hydrodynamic expansion loss at an electron temperature of about 50 eV, resulting in maximized emission.

Feasibility study of broadband efficient “water window” source

We demonstrate a table-top broadband emission water window source based on laser-produced high-Z plasmas. Resonance emission from multiply charged ions merges to produce intense unresolved transition arrays (UTAs) in the 2–4 nm region, extending below the carbon K edge (4.37 nm). Arrays resulting from n=4-n=4 transitions are overlaid with n=4-n=5 emission and shift to shorter wavelength with increasing atomic number. An outline of a microscope design for single-shot live cell imaging is proposed based on a bismuth plasma UTA source, coupled to multilayer mirror optics.

Extreme ultraviolet source at 6.7 nm based on a low-density plasma

We demonstrate an efficient extreme ultraviolet (EUV) source for operation at λ = 6.7 nm by optimizing the optical thickness of gadolinium (Gd) plasmas. Using low initial density Gd targets and dual laser pulse irradiation, we observed a maximum EUV conversion efficiency (CE) of 0.54% for 0.6% bandwidth (BW) (1.8% for 2% BW), which is 1.6 times larger than the 0.33% (0.6% BW) CE produced from a solid density target. Enhancement of the EUV CE by use of a low-density plasma is attributed to the reduction of self-absorption effects.

Systematic investigation of self-absorption and conversion efficiency of 6.7 nm extreme ultraviolet sources

We have investigated the dependence of the spectral behavior and conversion efficiencies of rare-earth plasma extreme ultraviolet sources with peak emission at 6.7 nm on laser wavelength and the initial target density. The maximum conversion efficiency was 1.3% at a laser intensity of 1.6×1012 W/cm2 at an operating wavelength of 1064 nm, when self-absorption was reduced by use of a low initial density target. Moreover, the lower-density results in a narrower spectrum and therefore improved spectral purity. It is shown to be important to use a low initial density target and/or to produce low electron density plasmas for efficient extreme ultraviolet sources when using high-Z targets.

Optimizing conversion efficiency and reducing ion energy in a laser-produced Gd plasma

We have demonstrated an efficient extreme ultraviolet (EUV) source at 6.7 nm by irradiating Gd targets with 0.8 and 1.06 μm laser pulses of 140 fs to 10 ns duration. Maximum conversion efficiency of 0.4% was observed within a 0.6% bandwidth. A Faraday cup observed ion yield and time of flight signals for ions from plasmas generated by each laser. Ion kinetic energy was lower for shorter pulse durations, which yielded higher electron temperatures required for efficient EUV emission, due to higher laser intensity. Picosecond laser pulses were found to be the best suited to 6.7 nm EUV source generation.

Investigation of Gd and Tb plasmas for beyond extreme ultraviolet lithography based on multilayer mirror performance

Recent work on multilayer mirror development for beyond extreme ultraviolet lithography indicates that their optimum reflectivity occurs at either 6.63 nm or 6.66 nm which may be too short a wavelength for Gd-based plasma sources. Calculations performed for Tb12+ to Tb28+ ions show that if the mirror reflectivity is fixed at one of these values, Tb may be a better source, though Gd is capable of providing greater intensity if the full reflection curve of the mirrors is exploited. Theoretical simulation shows that the Tb emission peaks close to 6.51 nm at an optimum electron temperature close to 120 eV.

Analysis of tungsten laser produced plasmas in the extreme ultraviolet (EUV) spectral region

Tungsten will be used as a wall material in ITER and therefore will be present as an intrinsic plasma impurity with the resulting emission having the potential to be used as a plasma diagnostic. We have recorded spectra of tungsten laser produced plasmas in the 1‐7 nm region using Nd:YAG lasers operating at a range of power densities. We have analysed these spectra, giving special attention to the unresolved transition arrays in the 3 nm region that appear at the highest laser power densities. We compare our results to those from previous work and also use new atomic structure calculations to identify a number of new features. (Some figures may appear in colour only in the online journal)

Gd plasma source modeling at 6.7 nm for future lithography

Plasmas containing gadolinium have been proposed as sources for next generation lithography at 6.x nm. To determine the optimum plasma conditions, atomic structure calculations have been performed for Gd11+ to Gd27+ ions which showed that n = 4 − n = 4 resonance transitions overlap in the 6.5–7.0 nm region. Plasma modeling calculations, assuming collisional-radiative equilibrium, predict that the optimum temperature for an optically thin plasma is close to 110 eV and that maximum intensity occurs at 6.76 nm under these conditions. The close agreement between simulated and experimental spectra from laser and discharge produced plasmas indicates the validity of our approach.

“Water window” sources: Selection based on the interplay of spectral properties and multilayer reflection bandwidth

Development of laser-produced plasma “water window” sources poses a major challenge in x-ray research and most effort has focused on line sources for use with zone plate optics. Here, a comparison of carbon and nitrogen line emission with that from both 3d – 4f and 4d – 4f unresolved transition arrays shows that, at power densities available from “table-top” solid-state lasers, 3d – 4f emission from zirconium plasmas is most intense, and calculations show that in an imaging system based on multilayer mirrors, for reflectance bandwidths >1% has superior performance than either line or broader-band sources. For bandwidths <1%, line sources are preferable.

The effect of viewing angle on the spectral behavior of a Gd plasma source near 6.7 nm

We have demonstrated the effect of viewing angle on the extreme ultraviolet (EUV) emission spectra of gadolinium (Gd) near 6.7 nm. The spectra are shown to have a strong dependence on viewing angle when produced with a laser pulse duration of 10 ns, which may be attributed to absorption by low ion stages of Gd and an angular variation in the ion distribution. Absorption effects are less pronounced at a 150-ps pulse duration due to reduced opacity resulting from plasma expansion. Thus for evaluating source intensity, it is necessary to allow for variation with both viewing angle and target orientation.