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Takashi Chiba

Tokyo Electron

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Publication

Featured researches published by Takashi Chiba.

Archive | 2004

Method for removing silicon oxide film and processing apparatus

Kazuhide Hasebe; Mitsuhiro Okada; Takashi Chiba; Jun Ogawa

Archive | 2004

Method for cleaning thin-film forming apparatus

Kazuhide Hasebe; Mitsuhiro Okada; Takashi Chiba; Jun Ogawa

Archive | 2004

Removing method and processing equipment for silicone oxide film

Takashi Chiba; Kazuhide Hasebe; Atsushi Ogawa; Mitsuhiro Okada; 貴司 千葉; 淳 小川; 充弘 岡田; 一秀 長谷部

Archive | 2005

FILM DEPOSITION METHOD, FILM DEPOSITION EQUIPMENT, AND STORAGE MEDIUM

Takashi Chiba; Kazuhide Hasebe; Mitsuhiro Okada; 貴司 千葉; 充弘 岡田; 一秀 長谷部

Archive | 2004

Thermal processing unit and thermal processing method

Kazuhide Hasebe; Yutaka Takahashi; Kota Umezawa; Satoshi Takagi; Mitsuhiro Okada; Takashi Chiba; Jun Ogawa

Archive | 2004

Method for cleaning heat treatment apparatus

Kazuhide Hasebe; Mitsuhiro Okada; Takashi Chiba; Jun Ogawa

Archive | 2009

Removal of metal contaminant deposited on quartz member of vertical heat processing apparatus

Hitoshi Katoh; Tsuneyuki Okabe; Kohichi Orito; Takashi Chiba

Archive | 2009

Removing method for silicone oxide film

Kazuhide Hasebe; Mitsuhiro Okada; Takashi Chiba; Atsushi Ogawa

Archive | 2009

Cleaning method and cleaning system for quartz member

Hitoshi Katoh; Tsuneyuki Okabe; Kohichi Orito; Takashi Chiba

Archive | 2009

THIN FILM FORMING DEVICE CLEANING METHOD, THIN FILM FORMING METHOD, AND THIN FILM FORMING DEVICE

Takashi Chiba; Kazuhide Hasebe; Atsushi Ogawa; Mitsuhiro Okada; 貴司 千葉; 淳 小川; 充弘 岡田; 一秀 長谷部

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Collaboration

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Kazuhide Hasebe

Tokyo Electron

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Mitsuhiro Okada

Tokyo Electron

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Jun Ogawa

Tokyo Electron

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Hitoshi Katoh

Tokyo Electron

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Kohichi Orito

Tokyo Electron

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Tsuneyuki Okabe

Tokyo Electron

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Satoshi Takagi

Tokyo Electron

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