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Takeo Ishibashi

Mitsubishi

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Publication

Featured researches published by Takeo Ishibashi.

Archive | 1998

Material for forming a fine pattern and method for manufacturing a semiconductor device using the same

Takeo Ishibashi; Toshiyuki Toyoshima; Keiichi Katayama; Ayumi Minamide

Archive | 2000

Method of manufacturing a semiconductor device using a minute resist pattern, and a semiconductor device manufactured thereby

Takeo Ishibashi; Toshiyuki Toyoshima; Keiichi Katayama; Naoki Yasuda

Archive | 1999

Method of manufacturing a semiconductor device having a fine pattern, and semiconductor device manufactured thereby

Takayuki Saito; Takeo Ishibashi; Toshiyuki Toyoshima; Kanji Sugino; Naoki Yasuda; Tadashi Miyagi

Archive | 1995

Method of forming a pattern of a multilayer type semiconductor device

Takeo Ishibashi

Archive | 2000

Method of manufacturing a semiconductor device having an improved fine structure

Mikihiro Tanaka; Takeo Ishibashi

Archive | 1999

Method of manufacturing a semiconductor device and semiconductor device manufactured by the method

Kanji Sugino; Takeo Ishibashi; Takayuki Shoya

Archive | 1994

Method of forming a fine resist pattern using an alkaline film covered photoresist

Takeo Ishibashi; Eiichi Ishikawa; Itaru Kanai

Archive | 1998

Material for forming fine pattern in semiconductor manufacture

Takeo Ishibashi; Toshiyuki Toyoshima; Ayumi Minamide; Keiichi Katayama

Archive | 2000

Production of a semiconductor device comprises forming a first resist layer on a semiconductor base layer, forming a resist pattern, forming a second resist layer, forming a crosslinked layer

Mikihiro Tanaka; Takeo Ishibashi

Archive | 2003

Via-filling material and process for fabricating semiconductor integrated circuit using the material

Teruhiko Kumada; Toshiyuki Toyoshima; Hideharu Nobutoki; Takeo Ishibashi; Yoshiharu Ono; Junjiro Sakai

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Collaboration

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Toshiyuki Toyoshima

Mitsubishi

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Keiichi Katayama

Mitsubishi

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Ayumi Minamide

Mitsubishi

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Kanji Sugino

Mitsubishi

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Naoki Yasuda

Mitsubishi

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Eiichi Ishikawa

Mitsubishi

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Itaru Kanai

Mitsubishi

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Mikihiro Tanaka

Mitsubishi

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Takayuki Shoya

Mitsubishi

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Takeshi Okita

Mitsubishi

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