Takeo Nishimura

Hillock-free aluminum thin films for electronic devices

The addition of an alloying element was proposed in order to suppress hillocks which grow on the surface of deposited aluminum conductors after they have been subjected to thermal cycling (200°C to room temperature) or high temperature heat treatment (400°C). The alloying element, tin, which has a small diffusion coefficient, a large binding energy with a lattice vacancy and a large atomic diameter, and manganese, which has a relatively small solid solubility into aluminum, were evaluated since they also have proper values of vapor pressure for ease of evaporation with aluminum. Alloy composition was determined to be just above the solid solubility of the element in aluminum at the deposition temperature of 350°C. It was proved experimentally that Al-0.06 wt pct Sn alloy and Al-0.1 wt pct Mn alloy, which had been selected for the abovementioned reason, had a marked effect in suppressing the growth of hillocks.

Optical Characteristics of Corning 7059 Glass Films Deposited by RF Sputtering

Corning 7059 glass films deposited by rf sputtering under certain conditions showed coloration phenomena. From thermodynamical calculations for oxides in 7059 glass, it was deduced that BaO became oxygen diffident to absorb visible light. This was supported by the experiments. Refractive indices of rf sputtered 7059 films were a few percents higher than that of 7059 bulk. The increase in refractive indices was explained by the change in the compositions, which were detected by electron microprobe analyzer. BaO and Al2O3 in the films were increased by 5–10%, while SiO2 was decreased by 5–10% and B2O3 remained practically unchanged.

A Color Camera with a Tri-Electrode Vidion

各原色ごとに分割された信号電極を有する3電極管およびこれを用いたカラーカメラを開発した.3電極方式には信号電極間の静電容量により色信号のクロストークの発生, 雑音の増加などの特異な現象があるが, これらの性質の解析, 視覚実験による許容限の設定を行い, 各部の最適定数を決定した.さらに3電極方式は色の一様性, ダイナミックレンジ, 安定性などにすぐれていることを試作カメラで確認した.

Tri-Electrode Vidicon for Use in a Single Tube Color TV Camera

3電極方式単管カラーカメラ用ビジコンを, 主として微細加工技術を検討することにより開発した.このビジコンは, ストライプ状色フィルターとそれに重ね合わさり2層配線法により相互接続されたストライプ状信号電極から成り立っている.3色の信号電流を独立した電極から取り出すことができるため, カメラは小型化でき, 色再現性, 一様性, 光量範囲を3管式相当にすることができる.

A novel tri-color pick-up tube for use in a single tube color TV camera

A novel tri-color pick-up tube which has the ability to simultaneously generate three independent video signals with a single tube has been successfully developed for use in a single tube color TV camera. The target consists of three sets of 216 color-sensitive striped electrodes corresponding to the red, green and blue striped filters. The striped electrodes of SnO 2 are precisely delineated by sputter-etching through a chromium mask and connected by the multilayered interconnection method. Cameras utilizing this new pick-up tube exhibited excellent performance owing to the target structure. That is, the hue of reproduced picture was natural and faithful to that of the original scene and the camera was easy to handle and stable in operation. The size was 125mm × 105mm × 310mm and the weight was 3.9kg.