Tatsufumi Aoi
Mitsubishi Heavy Industries
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Tatsufumi Aoi.
Applied Physics Letters | 2006
Hideo Yamakoshi; Koji Satake; Y. Takeuchi; Hiroshi Mashima; Tatsufumi Aoi
Two very-high-frequency powers between which the phase difference is varying in split of time are supplied to a ladder-shaped electrode through multiple feeding points located at symmetrical positions of the electrode to generate a large-area uniform plasma. Theoretical calculations of the voltage distribution at several phase difference show good agreement with experiments. Plasma emission uniformity within ±15% is demonstrated at 60MHz for the substrate size of 1.4×1.1m, with nitrogen gas of 10Pa.
Archive | 2001
Hideo Yamakoshi; Koji Satake; Yoshiaki Takeuchi; Hiroshi Mashima; Tatsufumi Aoi; Masayoshi Murata
Archive | 2007
Tatsufumi Aoi; Kuniyuki Kajinishi; Ichiro Yamashita; Shinji Nomura; Yoshio Sugimoto; Susumu Urano
Archive | 2009
Tatsufumi Aoi; Ichiro Yamashita; Kazuhiro Tsukuda; Etsuro Hirai; Yuichiro Kamino
Archive | 2008
Tatsufumi Aoi; Shuji Kaneko; Osamu Shibuya
Archive | 2007
Tatsufumi Aoi; Kuniyuki Kajinishi; Ichiro Yamashita; Susumu Urano; Shinji Nomura
Archive | 2003
Hiroshi Mashima; Keisuke Kawamura; Akemi Takano; Yoshiaki Takeuchi; Tetsuro Shigemizu; Tatsufumi Aoi
Archive | 2006
Mitsuo Kato; Shigenari Horie; Tatsufumi Aoi; Masaki Kawano; Yoshitaka Tsumoto; Hiroaki Ogasawara; Toshiro Kobayashi
Archive | 2011
Tatsufumi Aoi; Yuichiro Kamino; Yasuo Ogi; Akira Watanabe; Nobuyuki Shigeoka
Archive | 2008
Tatsufumi Aoi; Shuji Kaneko; Osamu Shibuya
