Tatsuhiko Koide
Toshiba
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Publication
Featured researches published by Tatsuhiko Koide.
Solid State Phenomena | 2018
Tatsuhiko Koide; Shinsuke Kimura; Takashi Kobayashi; Hiroyasu Iimori; Sugita Tomohiko; Katsuhiro Sato; Yoshihiro Ogawa
Recently, a surface energy reduction process (SERP) for stiction-free drying is used for a high aspect pattern structure like shallow trench isolation (STI). The key technology of SERP is trimethylsilyl (TMS) groups termination of the device surface. To explain the electrical influence of TMS groups was found acceptable by measuring the planar capacitor flat-band voltage shift, and the threshold voltage characteristics of 1x-nm node MOS transistors.
Archive | 2008
Hiroshi Tomita; Hiroyasu Iimori; Hisashi Okuchi; Tatsuhiko Koide; Linan Ji
Archive | 2010
Hiroshi Tomita; Tatsuhiko Koide; Hisashi Okuchi; Kentaro Shimayama; Hiroyasu Iimori; Linan Ji
Archive | 2010
Yoshihiro Ogawa; Tatsuhiko Koide; Shinsuke Kimura; Hisashi Okuchi; Hiroshi Tomita
Archive | 2010
Hiroyasu Iimori; Linan Ji; Tatsuhiko Koide; Hisashi Oguchi; Kentaro Shimayama; Hiroshi Tomita
Archive | 2010
Yukiko Kitajima; Hisashi Okuchi; Hiroshi Tomita; Hidekazu Hayashi; Tatsuhiko Koide
Archive | 2015
Tatsuhiko Koide; Shinsuke Kimura; Yoshihiro Ogawa; Hisashi Okuchi; Hiroshi Tomita
Archive | 2011
Yoshihiro Ogawa; Shinsuke Kimura; Tatsuhiko Koide; Hisashi Okuchi; Hiroshi Tomita
Archive | 2009
Shinsuke Kimura; Tatsuhiko Koide; Yoshihiro Ogawa; Hisashi Oguchi; Hiroshi Tomita
228th ECS Meeting (October 11-15, 2015) | 2015
Tatsuhiko Koide; Shinsuke Kimura; Hiroyasu Iimori; Tomohiko Sugita; Katsuhiro Sato; Yohei Sato; Yoshihiro Ogawa
