Is this you? Create Your Porfile
Avatar

Tatsuo Shiina

Tokyo Electron

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Tatsuo Shiina is active.

Explore More

Publication

Featured researches published by Tatsuo Shiina.

Archive | 2005

Method and apparatus for measuring temperature of substrate

Masafumi Ito; Yasuyuki Okamura; Tatsuo Shiina; Nobuo Ishii; Tomohiro Suzuki; Chishio Koshimizu

Archive | 2008

APPARATUS FOR MEASURING THICKNESS OF A SUBSTRATE

Masafumi Ito; Yasuyuki Okamura; Tatsuo Shiina; Nobuo Ishii; Tomohiro Suzuki; Chishio Koshimizu

Archive | 2003

METHOD AND DEVICE FOR MEASURING TEMPERATURE OF BASE MATERIAL

Masafumi Ito; Yasuyuki Okamura; Tatsuo Shiina; Nobuo Ishii

Archive | 2010

Led lidar apparatus

Moriaki Koyama; Tatsuo Shiina; 護哲 小山; 達雄 椎名

Archive | 2014

Advanced Correction of Blurred Image on Soft X-ray Projection Microscopy

Tatsuo Shiina; Jamsranjav Erdenetogtokh; Yasuhito Kinjo; Atsushi Ito; Kunio Shinohara

Archive | 2012

膜厚測定方法、測定装置、膜厚変化測定方法および測定装置

Tatsuo Shiina; 達雄 椎名; Kenji Mori; 健二 森; Toyohito Nakaoka; 豊人 中岡

Archive | 2011

Tomographic measuring device and tomographic measuring method

Tatsuo Shiina; 達雄 椎名

Archive | 2011

Evaluation of the Effect of Coherence on the Blur-Corrected Images in Soft X-ray Projection CT Microscopy

Tatsuo Shiina; Moriaki Koyama; Hideyuki Yoshimura; Yasuhito Kinjo; Atsushi Ito; Toshio Honda; Keiji Yada; Kunio Shinohara

Archive | 2010

High-Definition Blur-Corrected Image in Soft X-ray Projection CT Microscopy

Tatsuo Shiina; Kazuaki Hara; Moriaki Koyama; Hideyuki Yoshimura; Yasuhito Kinjo; Atsushi Ito; Toshio Honda; Keiji Yada; Kunio Shinohara

Archive | 2009

Blur correction of high-contrast images in Soft X-ray Projection CT Microscopy

Tatsuo Shiina; Moriaki Koyama; Hideyuki Yoshimura; Yasuhito Kinjo; Atsushi Ito; Toshio Honda; Kunio Shinohara

Explore More

Collaboration

Dive into the Tatsuo Shiina's collaboration.

Top Co-Authors
Avatar

Masafumi Ito

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Yasuyuki Okamura

Wakayama University

View shared research outputs
Top Co-Authors
Avatar

Toshio Honda

Chiba University

View shared research outputs
Top Co-Authors
Avatar

Atsushi Ito

Tokai University

View shared research outputs
Top Co-Authors
Avatar

Kunio Shinohara

Kobe University

View shared research outputs
Top Co-Authors
Avatar

Moriaki Koyama

Chiba University

View shared research outputs
Top Co-Authors
Avatar

Nobuo Ishii

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Yasuhito Kinjo

Industrial Technology Research Institute

View shared research outputs
Top Co-Authors
Avatar

Hideyuki Yoshimura

Meiji University

View shared research outputs
Top Co-Authors
Avatar

Chishio Koshimizu

Tokyo Electron

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge