Tengjiang Hu

Design and characterization of a microelectromechanical system electro-thermal linear motor with interlock mechanism for micro manipulators

The design, fabrication, and testing of a novel electro-thermal linear motor for micro manipulators is presented in this paper. The V-shape electro-thermal actuator arrays, micro lever, micro spring, and slider are introduced. In moving operation, the linear motor can move nearly 1 mm displacement with 100 μm each step while keeping the applied voltage as low as 17 V. In holding operation, the motor can stay in one particular position without consuming energy and no creep deformation is found. Actuation force of 12.7 mN indicates the high force generation capability of the device. Experiments of lifetime show that the device can wear over two million cycles of operation. A silicon-on-insulator wafer is introduced to fabricate a high aspect ratio structure and the chip size is 8.5 mm × 8.5 mm × 0.5 mm.

Design and Characterization of a Large Displacement Electro-thermal Actuator for a New Kind of Safety-and-Arming Device

Abstract The design, fabrication and characterization of a distinctive electro-thermal MEMS safety-and-arming device are presented in this paper. The device is comprised of a V-shape actuator and a micro lever. The V-shape actuator can generate a large output force but small displacement; thus, it is necessary to design a micro lever to amplify the insufficient displacement, which can broaden the device applications in different fields. The temperature distribution, the maximum displacement and the step response time of the actuator are analyzed and validated by the finite element analysis software ANSYS. The whole device is fabricated on SOI (Silicon-on-Insulator) wafer, and MUMPs process is introduced. The characterized performance of the device shows output displacement at more than 150 µm within 17 V driving voltage, and the consuming power is about 1.53 W. The chip size is about 5 × 5 × 0.5 mm3, which can be easily integrated with other micro devices.

Design of a novel electrothermal actuator for integrated MEMS safety-and-arming devices

The design, fabrication and characterization of a novel electrothermal actuator for MEMS safety-and-arming devices are presented in this paper. The device is comprised of two V-shape electrothermal actuators, a V-beam amplification and a mechanical slider. The two V-shape electrothermal actuators generate the original displacement and the V-beam amplification is used to amplify this displacement for arming. The characteristics of the V-shape actuator and V-beam amplification are analyzed and validated by finite element method. The whole device is fabricated on SOI wafer, and MUMPs process is introduced. The experiment results demonstrate that the displacement of the device is 120.89 μm with consuming power of 3.12 W and response time of 16 ms under an applied voltage of 16 V. The chip size is about 4mm*5mm*0.5mm, which can be easily integrated with other micro devices.

A high-speed image super-resolution algorithm based on sparse representation for MEMS defect detection

A novel high- speed image super-resolution algorithm based on sparse representation for MEMS defect detection is proposed in this paper. Traditional super-resolution algorithms adopt a single dictionary to represent images, which cannot differentiate varieties of image blocks and leads to slow processing speed. Aiming at overcoming this shortage of traditional super-resolution algorithms, image blocks are divided into different categories by local features and each of these categories possesses the corresponding high and low resolution dictionary pairs. Experimental results of different MEMS defects show that the improved algorithm can obtain images of little lower quality with much less processing time, indicating that the proposed algorithm is more suitable for MEMS defect detection.

Design and fabrication of an electro-thermal linear motor with large output force and displacement

The design, fabrication and testing of a novel electro-thermal linear motor is presented in this paper. The V-shape electro-thermal actuator arrays, micro lever, micro spring and slider are introduced. In moving operation, the linear motor can move 1 mm displacement while keeping the applied voltage as low as 17 V. In holding operation, the motor can stay in one particular position without consuming energy and no creep deformation is found. Actuation force of 12.7 mN indicates the high force generation capability of the device.