You Zhao

A High Performance Sensor for Triaxial Cutting Force Measurement in Turning

This paper presents a high performance triaxial cutting force sensor with excellent accuracy, favorable natural frequency and acceptable cross-interference for high speed turning process. Octagonal ring is selected as sensitive element of the designed sensor, which is drawn inspiration from ring theory. A novel structure of two mutual-perpendicular octagonal rings is proposed and three Wheatstone full bridge circuits are specially organized in order to obtain triaxial cutting force components and restrain cross-interference. Firstly, the newly developed sensor is tested in static calibration; test results indicate that the sensor possesses outstanding accuracy in the range of 0.38%–0.83%. Secondly, impacting modal tests are conducted to identify the natural frequencies of the sensor in triaxial directions (i.e., 1147 Hz, 1122 Hz and 2035 Hz), which implies that the devised sensor can be used for cutting force measurement in a high speed lathe when the spindle speed does not exceed 17,205 rev/min in continuous cutting condition. Finally, an application of the sensor in turning process is operated to show its performance for real-time cutting force measurement; the measured cutting forces demonstrate a good accordance with the variation of cutting parameters. Thus, the developed sensor possesses perfect properties and it gains great potential for real-time cutting force measurement in turning.

A High Performance Torque Sensor for Milling Based on a Piezoresistive MEMS Strain Gauge

In high speed and high precision machining applications, it is important to monitor the machining process in order to ensure high product quality. For this purpose, it is essential to develop a dynamometer with high sensitivity and high natural frequency which is suited to these conditions. This paper describes the design, calibration and performance of a milling torque sensor based on piezoresistive MEMS strain. A detailed design study is carried out to optimize the two mutually-contradictory indicators sensitivity and natural frequency. The developed torque sensor principally consists of a thin-walled cylinder, and a piezoresistive MEMS strain gauge bonded on the surface of the sensing element where the shear strain is maximum. The strain gauge includes eight piezoresistances and four are connected in a full Wheatstone circuit bridge, which is used to measure the applied torque force during machining procedures. Experimental static calibration results show that the sensitivity of torque sensor has been improved to 0.13 mv/Nm. A modal impact test indicates that the natural frequency of torque sensor reaches 1216 Hz, which is suitable for high speed machining processes. The dynamic test results indicate that the developed torque sensor is stable and practical for monitoring the milling process.

Development of a Tri-Axial Cutting Force Sensor for the Milling Process

This paper presents a three-component fixed dynamometer based on a strain gauge, which reduces output errors produced by the cutting force imposed on different milling positions of the workpiece. A reformative structure of tri-layer cross beams is proposed, sensitive areas were selected, and corresponding measuring circuits were arranged to decrease the inaccuracy brought about by positional variation. To simulate the situation with a milling cutter moving on the workpiece and validate the function of reducing the output errors when the milling position changes, both static calibration and dynamic milling tests were implemented on different parts of the workpiece. Static experiment results indicate that with standard loads imposed, the maximal deviation between the measured forces and the standard inputs is 4.87%. The results of the dynamic milling test illustrate that with identical machining parameters, the differences in output variation between the developed sensor and standard dynamometer are no larger than 6.61%. Both static and dynamic experimental results demonstrate that the developed dynamometer is suitable for measuring milling force imposed on different positions of the workpiece, which shows potential applicability in machining a monitoring system.

A piezoresistive micro-accelerometer with high frequency response and low transverse effect

With the purpose of measuring vibration signals in high-speed machinery, this paper developed a piezoresistive micro-accelerometer with multi-beam structure by combining four tiny sensing beams with four suspension beams. The eight-beam (EB) structure was designed to improve the trade-off between the sensitivity and the natural frequency of piezoresistive accelerometer. Besides, the piezoresistor configuration in the sensing beams reduces the cross interference from the undesirable direction significantly. The natural frequency of the structure and the stress on the sensing beams are theoretically calculated, and then verified through finite element method (FEM). The proposed sensor is fabricated on the n-type single crystal silicon wafer and packaged for experiment. The results demonstrate that the developed device possesses a suitable characteristic in sensitivity, natural frequency and transverse effect, which allows its usage in the measuring high frequency vibration signals.

Design and characterization of a microelectromechanical system electro-thermal linear motor with interlock mechanism for micro manipulators

The design, fabrication, and testing of a novel electro-thermal linear motor for micro manipulators is presented in this paper. The V-shape electro-thermal actuator arrays, micro lever, micro spring, and slider are introduced. In moving operation, the linear motor can move nearly 1 mm displacement with 100 μm each step while keeping the applied voltage as low as 17 V. In holding operation, the motor can stay in one particular position without consuming energy and no creep deformation is found. Actuation force of 12.7 mN indicates the high force generation capability of the device. Experiments of lifetime show that the device can wear over two million cycles of operation. A silicon-on-insulator wafer is introduced to fabricate a high aspect ratio structure and the chip size is 8.5 mm × 8.5 mm × 0.5 mm.

A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement

With the development of energetic materials (EMs) and microelectromechanical systems (MEMS) initiating explosive devices, the measurement of detonation pressure generated by EMs in the microscale has become a pressing need. This paper develops a manganin thin film ultra-high pressure sensor based on MEMS technology for measuring the output pressure from micro-detonator. A reliable coefficient is proposed for designing the sensor’s sensitive element better. The sensor employs sandwich structure: the substrate uses a 0.5 mm thick alumina ceramic, the manganin sensitive element with a size of 0.2 mm × 0.1 mm × 2 μm and copper electrodes of 2 μm thick are sputtered sequentially on the substrate, and a 25 μm thick insulating layer of polyimide is wrapped on the sensitive element. The static test shows that the piezoresistive coefficient of manganin thin film is 0.0125 GPa−1. The dynamic experiment indicates that the detonation pressure of micro-detonator is 12.66 GPa, and the response time of the sensor is 37 ns. In a word, the sensor developed in this study is suitable for measuring ultra-high pressure in microscale and has a shorter response time than that of foil-like manganin gauges. Simultaneously, this study could be beneficial to research on ultra-high-pressure sensors with smaller size.

Design and Development of a Three-Component Force Sensor for Milling Process Monitoring

A strain-type three-component table dynamometer is presented in this paper, which reduces output errors produced by cutting forces imposed on the different milling positions of a workpiece. A sensor structure with eight parallel elastic beams is proposed, and sensitive regions and Wheastone measuring circuits are also designed in consideration of eliminating the influences of the eccentric forces. To evaluate the sensor decoupling performance, both of the static calibration and dynamic milling test were implemented in different positions of the workpiece. Static experiment results indicate that the maximal deviation between the measured forces and the standard inputs is 4.58%. Milling tests demonstrate that with same machining parameters, the differences of the measured forces between different milling positions derived by the developed sensor are no larger than 6.29%. In addition, the natural frequencies of the dynamometer are kept higher than 2585.5 Hz. All the measuring results show that as a strain-type dynamometer, the developed force sensor has an improved eccentric decoupling accuracy with natural frequencies not much decreased, which owns application potential in milling process monitoring.

A beam-membrane structure micromachined differential pressure flow sensor.

A beam-membrane structure micromachined flow sensor is designed, depending on the principle of differential pressure caused by the mass flow, which is directly proportional to the square flow rate. The FSI (fluid structure interaction) characteristics of the differential pressure flow sensor are investigated via numerical analysis and analog simulation. The working mechanism of the flow sensor is analyzed depending on the FSI results. Then, the flow sensor is fabricated and calibrated. The calibration results show that the beam-membrane structure differential pressure flow sensor achieves ideal static characteristics and works well in the practical applications.

An improved structural design for accelerometers based on slotted eight-beam structure

Purpose n n n n nThe purpose of this paper is proposed a new structure design for high performance accelerometer. n n n n nDesign/methodology/approach n n n n nAn improved sensitivity structure considering sensitivity, natural frequency and cross-axis sensitivity is established and realized. The proposed structure was designed to improve the trade-off between the sensitivity and the natural frequency of piezoresistive accelerometer and eliminate the lateral sensitivity effect by the specific configuration, which is made possible by incorporating slots into the eight-beam structure. The mechanical model and its mathematical solution are established for calculating the sensitivity and natural frequency behavior of the designed structure. The developed sensor is fabricated on the n-type single-crystal silicon wafer and packaged for experiment. The accelerometer prototype was tested in the centrifugal machine and dynamic calibration system. n n n n nFindings n n n n nThe experimental results show that the sensitivity of the designed sensor is 0.213 mV/(Vg) and the natural frequency of the sensor is 14.22 kHz. Compared with some piezoresistive accelerometers in literatures, the designed sensor possesses a suitable characteristic in sensitivity, natural frequency and transverse effect, which allows its usage in measuring high frequency vibration signals. n n n n nOriginality/value n n n n nThe accelerometer with slotted eight-beam structure shows a good performance in the static and dynamic experiments and can be used in measuring high frequency vibration signals.

A MEMS SOI-based piezoresistive fluid flow sensor

In this paper, a SOI (silicon-on-insulator)-based piezoresistive fluid flow sensor is presented; the presented flow sensor mainly consists of a nylon sensing head, stainless steel cantilever beam, SOI sensor chip, printed circuit board, half-cylinder gasket, and stainless steel shell. The working principle of the sensor and some detailed contrastive analysis about the sensor structure were introduced since the nylon sensing head and stainless steel cantilever beam have distinct influence on the sensor performance; the structure of nylon sensing head and stainless steel cantilever beam is also discussed. The SOI sensor chip was fabricated using micro-electromechanical systems technologies, such as reactive ion etching and low pressure chemical vapor deposition. The designed fluid sensor was packaged and tested; a calibration installation system was purposely designed for the sensor experiment. The testing results indicated that the output voltage of the sensor is proportional to the square of the fluid flow velocity, which is coincident with the theoretical derivation. The tested sensitivity of the sensor is 3.91 × 10-4 V ms2/kg.